{"id":72999,"date":"2016-06-30T07:39:15","date_gmt":"2016-06-29T23:39:15","guid":{"rendered":"http:\/\/highscope.ch.ntu.edu.tw\/wordpress\/?p=72999"},"modified":"2021-10-06T16:09:24","modified_gmt":"2021-10-06T08:09:24","slug":"x%e5%b0%84%e7%b7%9a%e5%85%89%e9%9b%bb%e5%ad%90%e8%83%bd%e8%ad%9c%e5%84%80","status":"publish","type":"post","link":"http:\/\/localhost\/x%e5%b0%84%e7%b7%9a%e5%85%89%e9%9b%bb%e5%ad%90%e8%83%bd%e8%ad%9c%e5%84%80\/","title":{"rendered":"X\u5c04\u7dda\u5149\u96fb\u5b50\u80fd\u8b5c\u5100"},"content":{"rendered":"

X\u5c04\u7dda\u5149\u96fb\u5b50\u80fd\u8b5c\u5100 (X-ray photoelectron spectroscopy, XPS)<\/strong><\/span>
\n\u570b\u7acb\u81fa\u7063\u5e2b\u7bc4\u5927\u5b78\u5316\u5b78\u7cfb \u4fde\u59ff\u5b87<\/strong><\/span><\/p>\n

X \u5c04\u7dda\u5149\u96fb\u5b50\u80fd\u8b5c\u5100 (X-ray photoelectron spectroscopy, XPS) \u53c8\u7a31\u70ba\u5316\u5b78\u5206\u6790\u96fb\u5b50\u80fd\u8b5c\u5100 (electron spectroscopy for chemical analysis, ESCA)\uff0c\u7531\u745e\u5178\u7269\u7406\u5b78\u5bb6\u51f1\uff0e\u897f\u683c\u5df4\u6069 (Kai Siegbahn, 1918-2007) \u767c\u5c55\u7684\u6280\u8853\uff0c\u4e26\u69ae\u7372 1981 \u5e74\u8afe\u8c9d\u723e\u7269\u7406\u5b78\u734e\u30022<\/sup>\u5f9e 1960 \u5e74\u4ee3\u672b\u671f\u958b\u59cb\u666e\u904d\u904b\u7528\uff0c\u7814\u7a76\u56fa\u9ad4\u6750\u6599\u8868\u9762\u7684\u5316\u5b78\u7d44\u6210\uff0c\u78ba\u5b9a\u5404\u500b\u5143\u7d20\u7684\u5316\u5b78\u72c0\u614b\uff0c\u4e86\u89e3\u539f\u5b50\u7684\u9375\u7d50\u72c0\u614b\uff0c\u9748\u654f\u5ea6\u9ad8\uff0c\u5ee3\u6cdb\u904b\u7528\u5728\u79d1\u6280\u4e0a\u3002<\/p>\n

\u4e00\u822c\u53ef\u5206\u6790\u7684\u6df1\u5ea6\u70ba\uff1a<\/p>\n

    \n
  1. \u91d1\u5c6c\u6a23\u54c1 5\uff0d20 \u00c5<\/li>\n
  2. \u7121\u6a5f\u5316\u5408\u7269 10\uff0d30 \u00c5<\/li>\n
  3. \u6709\u6a5f\u5316\u5408\u7269 30\uff0d100 \u00c5<\/li>\n<\/ol>\n

    \u4e3b\u8981\u90e8\u4ef6<\/strong><\/span><\/p>\n

    X \u5c04\u7dda\u6e90\u3001\u6a23\u54c1\u5ba4\u3001\u80fd\u91cf\u5206\u6790\u5668\u3001\u96fb\u5b50\u5075\u6e2c\u5668\u3001\u8cc7\u6599\u8655\u7406\u5668\u3002\u5206\u6790\u904e\u7a0b\u4e2d\u6240\u7522\u751f\u7684\u5149\u96fb\u5b50\u8981\u5728\u8d85\u9ad8\u771f\u7a7a\u7cfb\u7d71 (ultrahigh vacuum system, UHV) \u4e2d\u98db\u884c\uff0c\u5927\u7d04 $$10^{-8}$$\uff5e$$10^{-9}$$\u00a0$$\\text{Pa}$$\uff0c\u6e1b\u5c11\u96fb\u5b50\u649e\u64ca\u5230\u7a7a\u6c23\u5206\u5b50\u7522\u751f\u96dc\u8a0a\uff0c\u4e5f\u53ef\u4ee5\u4fdd\u6301\u6a23\u54c1\u8868\u9762\u4e0d\u53d7\u6c59\u67d3\u3002<\/p>\n

    \"\"<\/a>

    \u5716\u4e00\u3001X\u5c04\u7dda\u5149\u96fb\u5b50\u80fd\u8b5c\u5100\uff08\u5716\u7247\u4f86\u6e90\uff1a\u672c\u6587\u4f5c\u8005\u4fde\u59ff\u5b87\u7e6a\u88fd\uff09<\/p><\/div>\n

    \u539f\u7406<\/strong><\/span><\/p>\n

    \u4ee5\u9382 $$(K_\\alpha h\\nu=1253.6~\\text{eV}$$\uff0c$$\\Delta E=0.7~\\text{eV})$$ \u6216\u92c1 $$(K_\\alpha h\\nu=1486.6~\\text{eV}$$\uff0c$$\\Delta E=0.85~\\text{eV})$$\u00a0\u4f5c\u70ba\u967d\u6975\u9776\u6750\uff0c\u7522\u751f X \u5c04\u7dda\uff0c\u7d93\u904e\u55ae\u5149\u5668\u8655\u7406\uff0c\u92c1 $$\\Delta E$$ \u53ef\u964d\u81f3 $$0.21~\\text{eV}$$\uff0c$$\\Delta E$$ \u8d8a\u5c0f\uff0c\u8b5c\u5100\u7684\u89e3\u6790\u5ea6\u8d8a\u9ad8\u3002\u66f2\u9762\u805a\u7126 X \u5c04\u7dda\uff0c\u80fd\u505a\u5c0f\u7bc4\u570d\u7684\u6383\u63cf\u30021<\/sup>\u5c04\u7dda\u51fa\u53e3\u8a2d\u6709\u6ffe\u7a97\uff0c\u9632\u6b62\u9776\u6750\u96fb\u5b50\u6df7\u5165\u5206\u6790\u5668\u4e2d\u3002<\/p>\n

    \u5177\u6709 X \u5c04\u7dda\u80fd\u91cf\u7684\u5149\u5b50\u7167\u5c04\u6750\u6599\u8868\u9762\uff0c\u8868\u9762\u7684\u539f\u5b50\u7684\u5167\u5c64\u96fb\u5b50\u5438\u6536\u7279\u5b9a\u80fd\u91cf\u88ab\u6e38\u96e2\uff0c\u88ab\u5149\u6240\u6fc0\u767c\u51fa\u7684\u96fb\u5b50\u7a31\u70ba\u5149\u96fb\u5b50\uff0c\u5149\u96fb\u5b50\u52d5\u80fd $$E_k=h\\nu-E_b-w$$\uff0c$$w$$ \u662f\u5100\u5668\u6240\u9020\u6210\u7684\u80fd\u91cf\u640d\u8017\u8996\u70ba\u5b9a\u8cea\uff0c$$h\\nu$$\u00a0<\/em>\u662f\u5165\u5c04 X \u5c04\u7dda\u7684\u80fd\u91cf\uff0c\u5075\u6e2c\u5668\u6e2c\u91cf\u5149\u96fb\u5b50\u7684\u52d5\u80fd\uff0c\u53cd\u63a8\u5149\u96fb\u5b50\u7684\u5728\u6750\u6599\u4e2d\u7684\u675f\u7e1b\u80fd (binding energy, $$E_b$$)\uff0c\u4f86\u9451\u5b9a\u6a23\u54c1\u7684\u5143\u7d20\u7a2e\u985e\u8207\u5316\u5b78\u74b0\u5883\uff0c\u82e5\u6a23\u54c1\u4e2d\u6709\u5169\u7a2e\u4ee5\u4e0a\u7684\u5143\u7d20\u5b58\u5728\uff0c\u96fb\u8ca0\u5ea6\u8f03\u5c0f\u7684\u5143\u7d20\u6703\u5e36\u90e8\u5206\u6b63\u96fb\uff0c\u5c0d\u96fb\u5b50\u7684\u675f\u7e1b\u80fd\u8f03\u9ad8\uff0c\u5206\u6790 $$E_b$$\u00a0<\/sub><\/em>\u7684\u5316\u5b78\u4f4d\u79fb\u5c31\u53ef\u4ee5\u5224\u65b7\u9019\u539f\u5b50\u7684\u5316\u5b78\u74b0\u5883\u3002<\/p>\n

    \u6a23\u54c1\u7684\u96fb\u5b50\u88ab\u6fc0\u767c\u5f8c\u5931\u53bb\u96fb\u5b50\uff0c\u6a23\u54c1\u5e36\u6b63\u96fb\uff0c\u5c0d\u65bc\u5c0e\u96fb\u6027\u4e0d\u597d\u7684\u6a23\u54c1\u6703\u5728\u5f8c\u7e8c\u7684\u6fc0\u767c\u904e\u7a0b\u51fa\u73fe\u8aa4\u5dee\uff0c\u5075\u6e2c\u5230\u7684\u5149\u96fb\u5b50\u52d5\u80fd\u6703\u6bd4\u539f\u672c\u5c0f\uff0c\u56e0\u6b64 ESCA \u914d\u6709\u96fb\u5b50\u69cd (electron flood gun) \u88dc\u5145\u4f4e\u80fd\u91cf\u7684\u96fb\u5b50\u5230\u6a23\u54c1\u4e0a\uff0c\u5e73\u8861\u6a23\u54c1\u7684\u6de8\u96fb\u91cf\uff0c\u4f46\u662f\u9019\u500b\u6b65\u9a5f\u6703\u7522\u751f\u4e00\u4e9b\u8aa4\u5dee\uff0c\u5f71\u97ff\u5149\u96fb\u5b50\u7684\u52d5\u80fd\uff0c\u7b97\u5728\u529f\u51fd\u6578\u4e2d\u30023<\/sup><\/p>\n

    \u5716\u8b5c\u5224\u8b80<\/strong><\/span><\/p>\n

    \u6bcf\u500b\u96fb\u5b50\u8ecc\u57df\u90fd\u6709\u4e0d\u540c\u80fd\u91cf\uff0c\u80fd\u5f9e\u6e2c\u5f97\u7684\u675f\u7e1b\u80fd\uff0c\u5224\u65b7\u96fb\u5b50\u7d44\u614b\uff0c\u4e26\u4e14\u85c9\u7531\u91cf\u5b50\u529b\u5b78\u4e2d\u7684\u81ea\u65cb\u8ecc\u9053\u5206\u88c2 (spin-orbit splitting) \u4f86\u5224\u8b80\u5716\u8b5c\u30023<\/sup><\/p>\n

    \u7279\u6027<\/strong><\/span><\/p>\n

      \n
    1. \u5c0d\u6a23\u54c1\u8868\u9762\u640d\u50b7\u8f15\u5fae<\/li>\n
    2. \u8a73\u7d30\u96fb\u5b50\u7d50\u69cb\u8a0a\u606f<\/li>\n
    3. \u5b9a\u6027\u5143\u7d20\u5206\u6790<\/li>\n
    4. \u8868\u9762\u5143\u7d20\u4e4b\u76f8\u5c0d\u539f\u5b50\u6fc3\u5ea6\u767e\u5206\u6bd4\u5b9a\u91cf<\/li>\n
    5. \u539f\u5b50\u5e8f\u5927\u65bc\u4e8c\u7684\u539f\u5b50\u7686\u53ef\u6e2c<\/li>\n
    6. \u63ee\u767c\u6027\u7684\u56fa\u9ad4\u4e0d\u80fd\u6e2c<\/li>\n
    7. \u5177\u6709\u78c1\u6027\u7269\u8cea\u4e0d\u80fd\u6e2c<\/li>\n
    8. \u8a0a\u865f\u7a84\uff0c\u5716\u8b5c\u7c21\u55ae\u6613\u8b80<\/li>\n<\/ol>\n

      \u80fd\u91cf\u5206\u6790\u5668<\/strong><\/span><\/p>\n

      XPS \u4f7f\u7528\u7684\u80fd\u91cf\u5206\u6790\u5668\u662f\u7403\u9762\u6247\u72c0\u578b (spherical sector analyzer) \uff0c\u5169\u7247\u5e36\u6709\u76f8\u53cd\u96fb\u6027\u7684\u5e73\u884c\u7403\u9762\u6975\u677f\uff0c\u5149\u96fb\u5b50\u5728\u96fb\u5834\u4e2d\u98db\u884c\uff0c\u552f\u6709\u7279\u5b9a\u80fd\u91cf\u7684\u96fb\u5b50\u80fd\u5230\u9054\u5075\u6e2c\u5668\uff0c\u5176\u4ed6\u80fd\u91cf\u7684\u96fb\u5b50\u56e0\u70ba\u7121\u6cd5\u5728\u96fb\u5834\u4e2d\u5e73\u8861\uff0c\u649e\u5230\u6975\u677f\u8b8a\u6210\u4e2d\u6027\u3002<\/p>\n

      \"\"<\/a>

      \u5716\u4e8c\u3001\u7403\u9762\u80fd\u91cf\u5206\u6790\u5668\uff08\u5716\u7247\u4f86\u6e90\uff1a\u672c\u6587\u4f5c\u8005\u4fde\u59ff\u5b87\u7e6a\u88fd\uff09<\/p><\/div>\n

      \u653e\u5927\u8a0a\u865f<\/strong><\/span><\/p>\n

      $$1.$$\u00a0\u900f\u904e\u55ae\u901a\u9053\u96fb\u5b50\u500d\u589e\u7ba1 (single channel electron multiplier) \u653e\u5927\u8a0a\u865f\uff0c\u901a\u9053\u5167\u6709\u8a31\u591a\u500d\u589e\u96fb\u6975 (dynode) \uff0c\u6bcf\u500b\u500d\u589e\u96fb\u6975\u4f9d\u7167\u96fb\u58d3\u5f9e\u5c0f\u5230\u5927\u6392\u5217\uff0c\u96fb\u5b50\u5c31\u6703\u9806\u8457\u901a\u9053\u4f9d\u5e8f\u64ca\u4e2d\u500d\u589e\u96fb\u6975\uff0c\u6bcf\u4e00\u6b21\u649e\u64ca\u80fd\u7522\u751f\u4e00\u5230\u4e09\u500b\u4e8c\u6b21\u96fb\u5b50\uff0c\u591a\u6b21\u649e\u64ca\u7522\u751f\u5f88\u591a\u4e8c\u6b21\u96fb\u5b50\u653e\u5927\u8a0a\u865f\u30024<\/sup><\/p>\n

      \"\"<\/a>

      \u5716\u4e09\u3001\u55ae\u901a\u9053\u96fb\u5b50\u500d\u589e\u7ba1\uff08\u5716\u7247\u4f86\u6e90\uff1a\u672c\u6587\u4f5c\u8005\u4fde\u59ff\u5b87\u7e6a\u88fd\uff09<\/p><\/div>\n

      $$2.$$\u00a0\u5fae\u901a\u9053\u677f (microchannel plate, MCP) \u4e5f\u662f\u4e00\u7a2e\u8a0a\u865f\u653e\u5927\u5668\uff0c\u539f\u7406\u76f8\u540c\uff0c\u4f46\u69cb\u9020\u662f\u7531\u5f88\u5c0f\u7684\u5c0e\u96fb\u73bb\u7483\u6bdb\u7d30\u7ba1\u9663\u5217\u7d44\u6210 2D \u69cb\u9020\u7684\u8584\u7247\u3002<\/p>\n

      \"\"<\/a>

      \u5716\u56db\u3001\u5fae\u901a\u9053\u677f\uff08\u5716\u7247\u4f86\u6e90\uff1a\u672c\u6587\u4f5c\u8005\u4fde\u59ff\u5b87\u7e6a\u88fd\uff09<\/p><\/div>\n

      \u7e31\u6df1\u5206\u6790<\/strong> (depth profile) <\/strong><\/p>\n

      \u914d\u5099 $$\\mathrm{Ar}$$\u3001$$\\mathrm{C_{60}}$$\u00a0<\/span>\u96e2\u5b50\u69cd (ion gun) \u7684 XPS \u8b5c\u5100\u5c31\u53ef\u9032\u884c\u7e31\u6df1\u5206\u6790\uff0c\u6e2c\u8a66\u7e31\u6df1\u65b9\u5411\u7684\u5143\u7d20\u5206\u5e03\uff0c\u96e2\u5b50\u69cd\u7684\u76ee\u7684\u662f\u505a\u7e31\u6df1\u5206\u6790\u6216\u6e05\u6f54\u6a23\u54c1\u8868\u9762\uff0c\u70ba\u4e00\u7a2e\u4f4e\u640d\u5bb3\u6ffa\u64ca\u7e31\u6df1\u5206\u6790\u3002<\/p>\n

      \n

      \u53c3\u8003\u6587\u737b<\/strong><\/p>\n

        \n
      1. Robinson, J. W.; Frame, E. M. S.; Frame II, G. M. (2005), Undergraduate Instrumental Analysis<\/em> (6th ed.). CRC Press. p880-897.<\/li>\n
      2. Kai Siegbahn \u2014 https:\/\/en.wikipedia.org\/wiki\/Kai_Siegbahn<\/a><\/li>\n
      3. \u5f35\u7acb\u4fe1\u3002\u8868\u9762\u5316\u5b78\u5206\u6790\u6280\u8853\u3002\u5948\u7c73\u901a\u8a0a\u300219\u5377 4\u3002\u7b2c17-23\u9801\u3002http:\/\/www.ndl.narl.org.tw\/docs\/publication\/19_4\/pdf\/D3.pdf<\/a><\/li>\n
      4. Electron multiplier \u2014 Wikipedia. https:\/\/en.wikipedia.org\/wiki\/Electron_multiplier<\/a><\/li>\n<\/ol>\n<\/div>","protected":false},"excerpt":{"rendered":"

        X\u5c04\u7dda\u5149\u96fb\u5b50\u80fd\u8b5c\u5100 (X-ray photoelectron spectroscopy, XPS) \u570b\u7acb\u81fa\u7063\u5e2b…<\/p>\n","protected":false},"author":50,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[8600,6214,108],"tags":[10013,10275,1916,10273,10012,10274],"class_list":["post-72999","post","type-post","status-publish","format-standard","hentry","category-8600","category-6214","category-chemistry00","tag-binding-energy","tag-electron-spectroscopy","tag-x-ray","tag-x","tag-10012","tag-10274","loop-entry","cat-8600","cat-6214","cat-108","no-thumbnail"],"views":20814,"_links":{"self":[{"href":"http:\/\/localhost\/wp-json\/wp\/v2\/posts\/72999","targetHints":{"allow":["GET"]}}],"collection":[{"href":"http:\/\/localhost\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/localhost\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/localhost\/wp-json\/wp\/v2\/users\/50"}],"replies":[{"embeddable":true,"href":"http:\/\/localhost\/wp-json\/wp\/v2\/comments?post=72999"}],"version-history":[{"count":1,"href":"http:\/\/localhost\/wp-json\/wp\/v2\/posts\/72999\/revisions"}],"predecessor-version":[{"id":86290,"href":"http:\/\/localhost\/wp-json\/wp\/v2\/posts\/72999\/revisions\/86290"}],"wp:attachment":[{"href":"http:\/\/localhost\/wp-json\/wp\/v2\/media?parent=72999"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/localhost\/wp-json\/wp\/v2\/categories?post=72999"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/localhost\/wp-json\/wp\/v2\/tags?post=72999"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}