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III-V\u65cf\u5316\u5408\u7269\u534a\u5c0e\u9ad4\u5728\u5149\u96fb\u5143\u4ef6\u4e2d\u7684\u61c9\u7528
\n<\/span>\u570b\u7acb\u5f70\u5316\u5e2b\u7bc4\u5927\u5b78\u5149\u96fb\u79d1\u6280\u7814\u7a76\u6240\u6797\u7950\u4ef2\u6559\u6388\/\u570b\u7acb\u5f70\u5316\u5e2b\u7bc4\u5927\u5b78\u6d2a\u9023\u8f1d\u6559\u6388\u8cac\u4efb\u7de8\u8f2f
\n<\/span><\/strong>
\nIII-V\u65cf\u5316\u5408\u7269\u534a\u5c0e\u9ad4\u7d55\u5927\u90e8\u5206\u5c6c\u65bc\u76f4\u63a5\u80fd\u9699\u534a\u5c0e\u9ad4\uff0c\u4e0d\u540c\u65bc\u9593\u63a5\u80fd\u9699\u4e4b\u77fd\u534a\u5c0e\u9ad4\u3002\u6240\u8b02\u76f4\u63a5\u80fd\u9699\u534a\u5c0e\u9ad4\u5247\u6307\u96fb\u5b50\u5f9e\u5c0e\u5e36\u5e95\u90e8\u6389\u843d\u81f3\u50f9\u5e36\u9802\u7aef\uff0c\u53ea\u7522\u751f\u80fd\u91cf\u7684\u8b8a\u5316\uff0c\u6b64\u80fd\u91cf\u5927\u7d04\u7b49\u65bc\u5c0e\u5e36\u5e95\u90e8\u8207\u50f9\u5e36\u9802\u7aef\u4e4b\u80fd\u91cf\u5dee\u7a31\u70ba\u8a72\u534a\u5c0e\u9ad4\u4e4b\u80fd\u9699\uff0c\u7136\u800c\u9593\u63a5\u80fd\u9699\u534a\u5c0e\u9ad4\u5247\u6307\u96fb\u5b50\u5f9e\u5c0e\u5e36\u5e95\u90e8\u6389\u843d\u81f3\u50f9\u5e36\u9802\u7aef\u6642\uff0c\u9664\u80fd\u91cf\u7684\u8b8a\u5316\u5916\uff0c\u9084\u5305\u62ec\u6676\u9ad4\u52d5\u91cf\u7684\u6539\u8b8a\uff0c\u5169\u8005\u4e4b\u7c21\u6613\u80fd\u5e36\u67b6\u69cb\u986f\u793a\u65bc\u5716\u4e00\u3002\u518d\u8005\uff0c\u6b64III-V\u65cf\u5316\u5408\u7269\u534a\u5c0e\u9ad4\u4e26\u975e\u5b58\u5728\u81ea\u7136\u754c\uff0c\u4e43\u662f\u5229\u7528\u6db2\u76f8\u78ca\u6676(\u7c21\u7a31LPE)\u6280\u8853\u3001\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d(\u7c21\u7a31CVD)\u6280\u8853\u3001\u5206\u5b50\u675f\u78ca\u6676(\u7c21\u7a31MBE)\u6280\u8853\u6216\u662f\u6709\u6a5f\u91d1\u5c6c\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d(\u7c21\u7a31MOCVD)\u6280\u8853\u6210\u9577III-V\u65cf\u5316\u5408\u7269\u8584\u819c\u65bc\u5404\u5f0f\u57fa\u677f\u4e0a\uff0c\u4f46\u5fc5\u9808\u8003\u616e\u57fa\u677f\u8207III-V\u5316\u5408\u7269\u534a\u5c0e\u9ad4\u9593\u7684\u6676\u683c\u5339\u914d\u554f\u984c\uff0c\u85c9\u7531\u4e0d\u540c\u57fa\u677f\u4f7f\u7528\u53ef\u6210\u9577\u4e0d\u540cIII-V\u65cf\u5316\u5408\u7269\u534a\u5c0e\u9ad4\uff0c\u6db5\u84cb\u4e8c\u5143\u3001\u4e09\u5143\u6216\u56db\u5143\u5316\u5408\u7269\u534a\u5c0e\u9ad4\u3002\u6b64\u5916\uff0c\u5728\u78ca\u6676\u904e\u7a0b\u4e2d\u4ea6\u53ef\u647b\u96dc\u5404\u7a2e\u96dc\u8cea\u6539\u8b8a\u6240\u6210\u9577\u4e4b\u5316\u5408\u7269\u534a\u5c0e\u9ad4\u7684\u5c0e\u96fb\u8f09\u5b50\u7279\u6027\u548c\u96fb\u5c0e\u7387\uff0c\u82e5\u6240\u6210\u9577\u4e4b\u5316\u5408\u7269\u534a\u5c0e\u9ad4\u7684\u4e3b\u8981\u8f09\u5b50\u662f\u96fb\u5b50\u5247\u5c6cn\u578b\u534a\u5c0e\u9ad4\uff0c\u82e5\u6240\u6210\u9577\u5316\u5408\u7269\u534a\u5c0e\u9ad4\u7684\u4e3b\u8981\u8f09\u5b50\u662f\u96fb\u6d1e\u5247\u5c6cp\u578b\u534a\u5c0e\u9ad4\uff0c\u82e5\u5c07p\u578b\u534a\u5c0e\u9ad4\u8584\u819c\u6210\u9577\u65bcn\u578b\u534a\u5c0e\u9ad4\u4e0a\u5247\u5f62\u6210p-n\u4e8c\u6975\u9ad4\uff0cp-n\u4e8c\u6975\u9ad4\u7684\u767c\u660e\u548c\u5176\u5f8c\u7684\u767c\u5c55\u5960\u5b9a\u4e86\u9019\u4e00\u5283\u6642\u4ee3\u7684\u5fae\u96fb\u5b50\u6280\u8853\u9769\u547d\u7684\u57fa\u790e\uff0c\u4ea6\u5ef6\u4f38\u61c9\u7528\u5728\u5149\u96fb\u5143\u4ef6\u88fd\u4f5c\u3002\u5716\u4e8c\u986f\u793a\u5e73\u8861\u6642\u4e4b\u540c\u8ceap-n\u4e8c\u6975\u9ad4\u7684\u80fd\u5e36\u67b6\u69cb\uff0cp-n\u754c\u9762\u8655\u6703\u5f62\u6210\u7a7a\u4e4f\u5340\uff0c\u5728\u7a7a\u4e4f\u5340\u4e2d\u4e26\u7121\u96fb\u5b50\u4e5f\u6c92\u6709\u96fb\u6d1e\u53ea\u5b58\u5728\u6e38\u96e2\u7684\u96dc\u8cea\uff0c\u5728n\u578b\u534a\u5c0e\u9ad4\u9019\u908a\u7684\u7a7a\u4e4f\u5340\u51fa\u73fe\u5e36\u6b63\u96fb\u8377\u7684\u96dc\u8cea\u96e2\u5b50(\u7a31\u70ba\u65bd\u9ad4)\uff0c\u5728p\u578b\u534a\u5c0e\u9ad4\u9019\u908a\u7684\u7a7a\u4e4f\u5340\u51fa\u73fe\u5e36\u8ca0\u96fb\u8377\u7684\u96dc\u8cea\u96e2\u5b50(\u7a31\u70ba\u53d7\u9ad4)\uff0c\u6b64\u5e36\u6b63\u8ca0\u96fb\u8377\u7684\u96dc\u8cea\u96e2\u5b50\u6703\u5728\u7a7a\u4e4f\u5340\u4e2d\u7522\u751f\u5167\u5efa\u96fb\u5834\uff0c\u7a7a\u4e4f\u5340\u5728\u5fae\u96fb\u5b50\u8207\u5149\u96fb\u5143\u4ef6\u61c9\u7528\u4e2d\u626e\u6f14\u91cd\u8981\u7684\u89d2\u8272\u3002\u7136\u800c\uff0c\u65bc20\u4e16\u7d0060\u5e74\u4ee3\u521d\u671f\u5247\u958b\u59cb\u7570\u8ceap-n\u7d50\u69cb\u7684\u7814\u7a76\uff0c\u6210\u9577\u7570\u8ceap-n\u534a\u5c0e\u9ad4\u7d50\u69cb\u4ecd\u9700\u8981\u8003\u616e\u7570\u8ceap-n\u754c\u9762\u5176\u6676\u683c\u5339\u914d\u554f\u984c\u4ee5\u4fbf\u964d\u4f4e\u754c\u9762\u7f3a\u9677\u7684\u7522\u751f\u3002\u5716\u4e09\u986f\u793a\u5e73\u8861\u6642\u4e4b\u7570\u8ceap-n\u4e8c\u6975\u9ad4\u7684\u80fd\u5e36\u67b6\u69cb\u3002\u5e95\u4e0b\u4ecb\u7d39\u4e09\u7a2e\u5149\u96fb\u534a\u5c0e\u9ad4\u5143\u4ef6\u6700\u5e38\u898b\u7684\u61c9\u7528\u3002<\/p>\n

(\u4e00)\u767c\u5149\u4e8c\u6975\u9ad4
\n\u3000\u3000\u5177\u76f4\u63a5\u80fd\u9699\u4e4bIII-V\u65cf\u534a\u5c0e\u9ad4\u5c0e\u5e36\u4e2d\u4e4b\u81ea\u7531\u96fb\u5b50\u8207\u50f9\u5e36\u4e2d\u7684\u96fb\u6d1e\u7522\u751f\u8f3b\u5c04\u8907\u5408\u6642\u5247\u6703\u91cb\u653e\u51fa\u76f8\u7576\u65bc\u80fd\u9699\u4e4b\u80fd\u91cf(Eg\uff0c\u55ae\u4f4d: eV)\u8f49\u800c\u653e\u5c04\u51fa\u7279\u5b9a\u6ce2\u9577(\u03bb\uff0c\u55ae\u4f4d: nm)\u7684\u5149\uff0c\u5169\u8005\u4e4b\u95dc\u4fc2\u70baEg = 1240\/\u03bb\uff0c\u4e00\u822c\u5b9a\u7fa9\u53ef\u898b\u5149\u7684\u6ce2\u9577\u7bc4\u570d\u7d04400 nm\u81f3750 nm\uff0c\u56e0\u6b64\u6210\u9577\u7279\u5b9a\u80fd\u9699(1.66 ~ 3.1 eV)\u4e4b\u76f4\u63a5\u80fd\u9699III-V\u65cfp-n\u4e8c\u6975\u9ad4\u4fbf\u69cb\u6210\u4e00\u500b\u53ef\u767c\u51fa\u53ef\u898b\u5149\u4e4b\u767c\u5149\u4e8c\u6975\u9ad4\u3002\u7576\u6b64\u767c\u5149\u4e8c\u6975\u9ad4\u4e4bp\u578b\u534a\u5c0e\u9ad4\u7aef\u6ce8\u5165\u96fb\u6d1en\u578b\u534a\u5c0e\u9ad4\u6ce8\u5165\u96fb\u5b50\u5247\u8655\u65bc\u9806\u504f\u72c0\u614b\uff0c\u5c0e\u81f4p-n\u754c\u9762\u7a7a\u4e4f\u5340\u8b8a\u7a84\uff0c\u96fb\u5b50\u548c\u96fb\u6d1e\u5c07\u65bc\u8fd1\u754c\u9762\u8655\u4ee5\u8f3b\u5c04\u8907\u5408\u65b9\u5f0f\u8907\u5408\u7136\u5f8c\u767c\u5149\u3002\u5716\u56db\u986f\u793a\u65e5\u4e9e\u516c\u53f8\u4e2d\u6751\u4fee\u4e8c\u6240\u767c\u8868\u4e4bInGaN\/AlGaN\u7570\u8cea\u7d50\u69cb\u85cd\u8272\u767c\u5149\u4e8c\u6975\u9ad4\u7684\u5143\u4ef6\u7d50\u69cb[1]\uff0c\u4f4d\u5728III-V\u65cf\u534a\u5c0e\u9ad4p-n\u754c\u9762\u4e4bZn-Si\u647b\u96dc\u4e4bInGaN\u5c64\u70ba\u767c\u5149\u5c64\uff0c\u6574\u500b\u5143\u4ef6\u7d50\u69cb\u986f\u793a\u5177\u6709p-n\u534a\u5c0e\u9ad4\u7d50\u69cb\u7279\u6027\u3002<\/p>\n

(\u4e8c)\u5149\u6aa2\u6e2c\u5668
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\u53c3\u8003\u6587\u737b
\n<\/strong>1.\u00a0 \u00a0 \u00a0 \u00a0 S, Nakamura, Jpn. J. Appl. Phys. 30, L1705 (1991).
\n2.\u00a0 \u00a0 \u00a0 \u00a0 D. J. H. et al. Appl. Phys. Lett. 77, 1900 (2000).
\n3.\u00a0 \u00a0 \u00a0 \u00a0 \u592a\u967d\u96fb\u6c60\u6280\u8853\u5165\u9580, \u6797\u660e\u737b \u7de8\u8457 (\u5168\u83ef\u5716\u66f8\u516c\u53f8,\u53f0\u5317, 2007).<\/p>\n<\/div>","protected":false},"excerpt":{"rendered":"

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