{"id":17916,"date":"2009-08-30T10:34:54","date_gmt":"2009-08-30T02:34:54","guid":{"rendered":"http:\/\/highscope.ch.ntu.edu.tw\/wordpress\/?p=17916"},"modified":"2021-10-06T16:47:20","modified_gmt":"2021-10-06T08:47:20","slug":"%e5%8e%9f%e5%ad%90%e5%8a%9b%e9%a1%af%e5%be%ae%e9%8f%a1%ef%bc%88atomic-force-micricopy-afm%ef%bc%89%ef%bc%88%e4%b8%80%ef%bc%89","status":"publish","type":"post","link":"http:\/\/localhost\/%e5%8e%9f%e5%ad%90%e5%8a%9b%e9%a1%af%e5%be%ae%e9%8f%a1%ef%bc%88atomic-force-micricopy-afm%ef%bc%89%ef%bc%88%e4%b8%80%ef%bc%89\/","title":{"rendered":"\u539f\u5b50\u529b\u986f\u5fae\u93e1\uff08\u4e00\uff09"},"content":{"rendered":"

\u539f\u5b50\u529b\u986f\u5fae\u93e1 (<\/span>Atomic Force Micricopy, AFM)\uff08\u4e00\uff09
\n<\/span>\u570b\u7acb\u5f70\u5316\u5e2b\u7bc4\u5927\u5b78\u7269\u7406\u6240\u9673\u5efa\u6dfc\u7814\u7a76\u751f\/\u570b\u7acb\u5f70\u5316\u5e2b\u7bc4\u5927\u5b78\u6d2a\u9023\u8f1d\u6559\u6388\u8cac\u4efb\u7de8\u8f2f
\n<\/span><\/strong>
\nA.\u00a0\u00a0\u539f\u5b50\u529b\u986f\u5fae\u93e1<\/strong>\u4ecb\u7d39<\/strong><\/span><\/p>\n

\u85c9\u7531AFM\u4eba\u5011\u5c07\u7b2c\u4e00\u6b21\u76f4\u89c0\u5730\u770b\u5230\u4e86\u539f\u5b50\u3001\u5206\u5b50\uff0c\u88ab\u4eba\u5011\u7a31\u70ba\u53ef\u4ee5\u770b\u5f97\u898b\u539f\u5b50\u7684\u986f\u5fae\u93e1\u3002\u5229\u7528\u5fae\u61f8\u81c2\u611f\u53d7\u548c\u653e\u5927\u61f8\u81c2\u4e0a\u5c16\u7d30\u63a2\u91dd\u8207\u53d7\u6e2c\u6a23\u54c1\u539f\u5b50\u4e4b\u9593\u7684\u4f5c\u7528\u529b\uff0c\u5f9e\u800c\u9054\u5230\u6aa2\u6e2c\u7684\u76ee\u7684\uff0c\u5177\u6709\u539f\u5b50\u7d1a\u7684\u89e3\u6790\u5ea6\u3002
\n\u57281982\u5e74\u5169\u4f4d\u79d1\u5b78\u5bb6Binning\u548cRohrer\u5229\u7528\u96a7\u9053\u96fb\u6d41\u6548\u61c9\u767c\u660e\u4e86\u6383\u63cf\u7a7f\u9042\u5f0f\u986f\u5fae\u93e1(STM) \uff0c\u70ba\u9996\u6b21\u89c0\u5bdf\u5230\u539f\u5b50\u3001\u5206\u5b50\uff0c\u53ea\u4e0d\u904e\u5728\u8655\u7406STM\u7684\u8a66\u7247\u6a23\u54c1\u4e0a\u6709\u6240\u9650\u5236\uff0c\u5c0d\u65bc\u975e\u5c0e\u96fb\u7269\u54c1\u4e0d\u9069\u7528\u30021985\u5e74Binning\u548cGerber\u3001Quate\u5171\u540c\u767c\u660e\u4e86 AFM\uff0c\u5229\u7528\u539f\u5b50\u9593\u7684\u51e1\u5f97\u74e6\u529b\uff0c\u5f85\u6e2c\u6a23\u54c1\u4e0d\u9808\u5c0e\u96fb\u6027\u4e5f\u53ef\u4ee5\u6e2c\u91cf\uff0c\u8b93\u91cf\u6e2c\u7684\u53ef\u7528\u7bc4\u570d\u66f4\u70ba\u5ee3\u6cdb\uff0c\u5c0d\u65bc\u6a23\u672c\u8868\u9762\u73fe\u8c61\u7684\u7814\u7a76\u4e5f\u66f4\u52a0\u7684\u6df1\u5165\u3002<\/p>\n

AFM\u539f\u5b50\u529b\u986f\u5fae\u93e1<\/span><\/strong>\u8207STM\u6383\u63cf\u5f0f\u7a7f\u96a7\u5f0f\u986f\u5fae\u93e1\u6700\u5927\u7684\u5dee\u5225\u5728\u65bc\u4e26\u975e\u5229\u7528\u96fb\u5b50\u91cf\u5b50\u7a7f\u96a7\u6548\u61c9\uff0c\u800c\u662f\u5229\u7528\u539f\u5b50\u4e4b\u9593\u7684\u51e1\u5f97\u74e6\u529b\u4f5c\u7528\u4f86\u5448\u73fe\u6a23\u54c1\u7684\u8868\u9762\u7279\u6027\u3002\u9019\u7576\u4e2d\u7684\u539f\u7406\u662f\u611f\u6e2c\u539f\u5b50\u4e4b\u9593\u7684\u51e1\u5f97\u74e6\u529b\u4f5c\u7528\u4f86\u9032\u4e00\u6b65\u5448\u73fe\u6a23\u672c\u7684\u8868\u9762\u7279\u6027\uff0c\u53ef\u4ee5\u7531\u57161\u5f97\u77e5\uff1a<\/p>\n

\u7576\u539f\u5b50\u8207\u539f\u5b50\u5f88\u63a5\u8fd1\u6642\uff0c\u5f7c\u6b64\u96fb\u5b50\u96f2\u65a5\u529b\u7684\u4f5c\u7528\u5927\u65bc\u539f\u5b50\u6838\u8207\u96fb\u5b50\u96f2\u4e4b\u9593\u7684\u5438\u5f15\u529b\u4f5c\u7528\uff0c\u6240\u4ee5\u6574\u500b\u6de8\u529b\u8868\u73fe\u70ba\u65a5\u529b\u7684\u4f5c\u7528\uff0c\u53cd\u4e4b\u82e5\u5169\u539f\u5b50\u5206\u958b\u6709\u4e00\u5b9a\u8ddd\u96e2\u6642\uff0c\u5f7c\u6b64\u4e4b\u9593\u96fb\u5b50\u96f2\u65a5\u529b\u7684\u4f5c\u7528\u5c0f\u65bc\u5f7c\u6b64\u539f\u5b50\u6838\u8207\u96fb\u5b50\u96f2\u4e4b\u9593\u7684\u5438\u5f15\u529b\u4f5c\u7528\u3002\u53ef\u4ee5\u7531\u5716\u4e00\u770b\u51fa\uff1a<\/p>\n

\"\"<\/a><\/p>\n

\u57161\u00a0\u00a0\u539f\u5b50\u4f4d\u80fd\u5716<\/p>\n

AFM\u7684\u63a2\u91dd\u8207\u6a23\u54c1\u8868\u9762\u7684\u4f5c\u7528\u529b\u53ef\u4ee5\u63a7\u5236\u5728\u975e\u5e38\u5fae\u5c0f\u7684\u91cf\uff0c\u7d04\u572810-6-10-10 N\u4e4b\u7bc4\u570d\uff0c\u56e0\u6b64AFM\u7684\u89e3\u6790\u5ea6\u53ef\u9054\u539f\u5b50\u5c3a\u5bf8\u3002\u7531\u65bcAFM\u5177\u6709\u539f\u5b50\u7d1a\u7684\u89e3\u6790\u5ea6\uff0c\u662f\u5404\u7a2e\u8584\u819c\u7c97\u7cd9\u5ea6( roughness)\u6aa2\u6e2c\u53ca\u5fae\u89c0\u8868\u9762\u7d50\u69cb\u7814\u7a76\u7684\u91cd\u8981\u5de5\u5177\uff0c\u4e5f\u9069\u5408\u8207STEM\u642d\u914d\u6210\u70ba\u5f9enm\u81f3A\u3002<\/p>\n

\u5728\u61c9\u7528\u4e0a\u5206\u70ba\u4e0b\u5217\u56db\u9ede\u512a\u52e2\uff1a<\/p>\n

\u00a01. AFM\u6280\u8853\u7684\u6a23\u54c1\u88fd\u5099\u7c21\u55ae\uff0c\u7121\u9700\u5c0d\u6a23\u54c1\u9032\u884c\u7279\u6b8a\u8655\u7406\uff0c\u5982\u934d\u9285\u6216\u78b3\uff0c\u9019\u7a2e\u8655\u7406\u5c0d\u6a23\u54c1\u6703\u9020\u6210\u4e0d\u53ef\u9006\u8f49\u7684\u50b7\u5bb3\u56e0\u6b64\uff0c\u5176\u7834\u58de\u6027\u8f03\u5176\u5b83\u751f\u7269\u5b78\u5e38\u7528\u6280\u8853\uff08\u5982\u96fb\u5b50\u986f\u5fae\u93e1\uff09\u8981\u5c0f\u5f97\u591a\u3002<\/p>\n

2.AFM\u80fd\u5728\u591a\u7a2e\u74b0\u5883\uff08\u5305\u62ec\u7a7a\u6c23\u3001\u6db2\u9ad4\u548c\uff09\u4e2d\u904b\u4f5c\uff0c\u4e0d\u5fc5\u50cf\u96fb\u5b50\u986f\u5fae\u93e1\u5fc5\u9808\u904b\u884c\u5728\u9ad8\u771f\u7a7a\u689d\u4ef6\u4e0b\uff0c\u751f\u7269\u5206\u5b50\u53ef\u5728\u751f\u7406\u689d\u4ef6\u4e0b\u76f4\u63a5\u6210\u50cf\uff0c\u4e5f\u53ef\u5c0d\u6d3b\u7d30\u80de\u9032\u884c\u6642\u52d5\u614b\u89c0\u5bdf\u3002<\/p>\n

3. \u4e0d\u540c\u65bc\u96fb\u5b50\u986f\u5fae\u93e1\u53ea\u80fd\u63d0\u4f9b\u4e8c\u7dad\u5716\u50cf\uff0cAFM\u80fd\u63d0\u4f9b\u751f\u7269\u5206\u5b50\u548c\u751f\u7269\u8868\u9762\u7684\u5206\u5b50\u5206\u8fa8\u7387\u7684\u4e09\u7dad\u5716\u50cf\u3002<\/p>\n

4.AFM\u4ee5\u5948\u7c73\u5c3a\u5ea6\u7684\u5206\u8fa8\u7387\u89c0\u5bdf\u5c40\u90e8\u7684\u96fb\u8377\u5bc6\u5ea6\u548c\u7269\u7406\u7279\u6027\uff0c\u6e2c\u91cf\u5206\u5b50\u9593\u7684\u76f8\u4e92\u4f5c\u7528\u529b\u3002<\/p>\n

\u00a0\u800c\u5728\u7f3a\u9ede\u4e0a\uff0c\u6bd4\u8f03\u65bc\u540c\u6a23\u8868\u9762\u6383\u63cf\u7684\u6383\u63cf\u5f0f\u96fb\u5b50\u986f\u5fae\u93e1(SEM)\uff0cAFM\u7684\u7f3a\u9ede\u5728\u65bc\u6210\u50cf\u7bc4\u570d\u5c0f\u3001\u901f\u5ea6\u6162\u3001\u800c\u4e14\u63a2\u982d\u5bb9\u6613\u640d\u50b7\uff0c\u9808\u5e38\u5e38\u7f6e\u63db\u3002<\/p>\n

B. \u539f\u5b50\u529b\u986f\u5fae\u93e1<\/strong>\u91cf\u6e2c<\/strong><\/span><\/h3>\n

\u5728AFM\u7684\u7cfb\u7d71\u4e2d\uff0c\u662f\u611f\u6e2c\u5fae\u5c0f\u63a2\u91dd\u8207\u5f85\u6e2c\u7269\u4e4b\u9593\u4ea4\u4e92\u4f5c\u7528\u529b\u5982\u57162\uff0c\u4f86\u5448\u73fe\u5f85\u6e2c\u7269\u7684\u8868\u9762\u4e4b\u7269\u7406\u7279\u6027\u3002\u7531\u65bcAFM\u5177\u6709\u539f\u5b50\u7d1a\u7684\u89e3\u6790\u5ea6\u5176\u57fa\u672c\u67b6\u69cb\u5982\u57163\u3002<\/p>\n

\"\"<\/a><\/p>\n

AFM\u7684\u5fae\u5c0f\u63a2\u91dd\u901a\u5e38\u662f\u9ecf\u9644\u5728\u61f8\u81c2\u5f0f\u7684\u5f48\u7c27\u7247\u4e0a\uff0c\u7576\u63a2\u91dd\u5c16\u7aef\u8207\u6a23\u54c1\u8868\u9762\u63a5\u8fd1\u6642\uff0c\u56e0\u529b\u5834\u800c\u7522\u751f\u4f5c\u7528\u529b\uff0c\u9020\u6210\u61f8\u81c2\u7c27\u7247\u7684\u5fae\u5c0f\u504f\u6298\uff0c\u6b64\u7c27\u7247\u7684\u5f48\u6027\u8b8a\u5f62\u91cf\uff0c\u53ef\u4ee5\u5229\u7528\u7c27\u7247\u5f8c\u65b9\u7684STM\u63a2\u91dd\u6240\u6e2c\u5f97\uff0c\u4e5f\u53ef\u4ee5\u5229\u7528\u96fb\u5bb9\u611f\u61c9\u6cd5\u3001\u5149\u5b78\u5075\u6e2c\u6cd5\u4f86\u611f\u6e2c\u3002<\/p>\n

AFM\u4e4b\u91cf\u6e2c\u6a21\u5f0f\u4f9d\u64da\u63a2\u91dd\u8207\u6a23\u672c\u9593\u7684\u8ddd\u96e2\u53ef\u5206\u70ba\u4e09\u7a2e\u64cd\u4f5c\u6a21\u5f0f\uff1a\u63a5\u89f8\u5f0f\u3001\u975e\u63a5\u89f8\u5f0f\u8207\u6572\u64ca\u5f0f\u3002<\/p>\n

(1)\u63a5\u89f8\u5f0f\uff08contact mode\uff09\uff1a<\/strong><\/p>\n

\u5229\u7528\u91dd\u5c16\u7684\u539f\u5b50\u8207\u6a23\u672c\u8868\u9762\u539f\u5b50\u4e4b\u9593\u6392\u65a5\u529b\u7684\u8b8a\u5316\u800c\u7522\u751f\u8868\u9762\u8f2a\u5ed3\u7684\u65b9\u5f0f\u7a31\u70ba\u63a5\u89f8\u5f0f\uff0c\u5176\u4e92\u65a5\u80fd\u7684\u5927\u5c0f\u4e3b\u8981\u8207\u539f\u5b50\u9593\u8ddd\u5012\u6578\u7684\u5341\u4e8c\u6b21\u65b9\u6210\u6b63\u6bd4\uff0c\u7576\u63a2\u91dd\u8207\u8a66\u7247\u7684\u8ddd\u96e2\u7d04\u70ba\u6578\u500bA\u6642(\u4e00\u822c\u70ba3 A)\uff0c\u5169\u539f\u5b50\u7684\u96fb\u5b50\u96f2\u6703\u6709\u4e92\u65a5\u73fe\u8c61\u5176\u539f\u5b50\u9593\u7684\u6392\u65a5\u529b\u7d04\u70ba10-6\u81f310-10 N\uff0c\u7531\u65bc\u63a5\u89f8\u9762\u7a4d\u6975\u5c0f\u4e14\u8fd1\uff0c\u56e0\u6b64\u904e\u5927\u7684\u4f5c\u7528\u529b\u53ef\u80fd\u6703\u9020\u6210\u6a23\u54c1\u8868\u9762\u640d\u58de\uff0c\u5c24\u5176\u662f\u8edf\u6027\u6750\u8cea\uff0c\u56e0\u6b64\u5728\u6383\u63cf\u751f\u7269\u6a23\u54c1\u6642\u6216\u8edf\u6027\u6750\u8cea\uff0c\u5fc5\u9808\u7279\u5225\u6ce8\u610f\u529b\u7684\u5927\u5c0f\u5c0d\u6a23\u672c\u8868\u9762\u7684\u5f71\u97ff\u3002\u4e0d\u904e\u56e0\u70ba\u662f\u63a5\u89f8\u6027\u7684\u7de3\u6545\uff0c\u4e0d\u50c5\u50c5\u6a23\u54c1\u8868\u9762\u53d7\u640d\u50b7\u3001\u63a2\u91dd\u4e5f\u5bb9\u6613\u53d7\u640d\u58de\u3002<\/p>\n

(2)\u975e\u63a5\u89f8\u5f0f\uff08non-contact mode\uff09\uff1a<\/strong><\/p>\n

\u5229\u7528\u91dd\u5c16\u7684\u539f\u5b50\u8207\u6a23\u672c\u8868\u9762\u539f\u5b50\u4e4b\u9593\u5438\u5f15\u529b\u7684\u8b8a\u5316\u800c\u7522\u751f\u8868\u9762\u8f2a\u5ed3\u7684\u65b9\u5f0f\u7a31\u70ba\u975e\u63a5\u89f8\u5f0f\uff0c\u5176\u5438\u5f15\u529b\u7684\u5927\u5c0f\u4e3b\u8981\u8207\u539f\u5b50\u9593\u8ddd\u5012\u6578\u7684\u516d\u6b21\u65b9\u6210\u6b63\u6bd4\u3002\u975e\u63a5\u89f8\u5f0f\u662f\u5229\u7528\u539f\u5b50\u9593\u9577\u8ddd\u96e2\u5438\u5f15\u529b-\u51e1\u5f97\u74e6\u723e\u529b\u5c0d\u8ddd\u96e2\u7684\u8b8a\u5316\u975e\u5e38\u5c0f\uff0c\u91dd\u548c\u6a23\u54c1\u8868\u9762\u7684\u8ddd\u96e2\u70ba\u6578\u5341\u5230\u6578\u767eA\uff0c\u7531\u65bc\u63a2\u91dd\u548c\u6a23\u54c1\u6c92\u6709\u63a5\u89f8\uff0c\u6240\u4ee5\u6a23\u54c1\u4e0d\u6613\u88ab\u640d\u58de\uff0c\u4f46\u7531\u65bc\u63a2\u91dd\u548c\u6a23\u54c1\u4e26\u672a\u63a5\u89f8\uff0c\u56e0\u6b64\u975e\u63a5\u89f8\u6a21\u5f0f\u7684\u5448\u50cf\u4e4b\u7a7a\u9593\u89e3\u6790\u5ea6\u8f03\u5dee\uff0c\u70ba\u5176\u7f3a\u9ede\u3002<\/p>\n

(3)\u534a\u63a5\u89f8\u5f0f\uff1a<\/strong><\/p>\n

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\n

\u53c3\u8003\u8cc7\u6599
\n<\/strong>http:\/\/en.wikipedia.org\/wiki\/Atomic_force_microscope<\/a><\/p>\n<\/div>","protected":false},"excerpt":{"rendered":"

\u539f\u5b50\u529b\u986f\u5fae\u93e1 (Atomic Force Micricopy, AFM)\uff08\u4e00\uff09 \u570b\u7acb\u5f70\u5316\u5e2b\u7bc4\u5927\u5b78\u7269\u7406\u6240\u9673\u5efa\u6dfc\u7814…<\/p>\n","protected":false},"author":50,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[107,37,38],"tags":[566,567,568,570,569],"class_list":["post-17916","post","type-post","status-publish","format-standard","hentry","category-physics00","category-physics08","category-physics08-01","tag-afm","tag-atomic","tag-force","tag-micricopy","tag-569","loop-entry","cat-107","cat-37","cat-38","no-thumbnail"],"views":27645,"_links":{"self":[{"href":"http:\/\/localhost\/wp-json\/wp\/v2\/posts\/17916","targetHints":{"allow":["GET"]}}],"collection":[{"href":"http:\/\/localhost\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/localhost\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/localhost\/wp-json\/wp\/v2\/users\/50"}],"replies":[{"embeddable":true,"href":"http:\/\/localhost\/wp-json\/wp\/v2\/comments?post=17916"}],"version-history":[{"count":1,"href":"http:\/\/localhost\/wp-json\/wp\/v2\/posts\/17916\/revisions"}],"predecessor-version":[{"id":90459,"href":"http:\/\/localhost\/wp-json\/wp\/v2\/posts\/17916\/revisions\/90459"}],"wp:attachment":[{"href":"http:\/\/localhost\/wp-json\/wp\/v2\/media?parent=17916"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/localhost\/wp-json\/wp\/v2\/categories?post=17916"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/localhost\/wp-json\/wp\/v2\/tags?post=17916"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}