{"id":45765,"date":"2025-09-30T18:00:35","date_gmt":"2025-09-30T10:00:35","guid":{"rendered":"https:\/\/case.ntu.edu.tw\/blog\/?p=45765"},"modified":"2025-09-26T11:34:35","modified_gmt":"2025-09-26T03:34:35","slug":"%e3%80%90%e5%be%ae%e5%bd%b1%e8%a3%bd%e7%a8%8b%e5%a4%a7%e8%a7%a3%e5%af%86%e3%80%912-2025%e5%b9%b4%e6%ad%a3%e5%b1%95%e9%96%8b%e7%9a%84%e5%8d%8a%e5%b0%8e%e9%ab%94%e7%ab%b6%e8%b3%bd","status":"publish","type":"post","link":"https:\/\/case.ntu.edu.tw\/blog\/?p=45765","title":{"rendered":"\u3010\u5fae\u5f71\u88fd\u7a0b\u5927\u89e3\u5bc6\u3011(2)\u2014\u20142025\u5e74\u6b63\u5c55\u958b\u7684\u534a\u5c0e\u9ad4\u7af6\u8cfd"},"content":{"rendered":"

\u5728\u6676\u7247\u5fae\u7e2e\u7684\u7af6\u8cfd\u4e2d\uff0c\u904e\u53bb\u516d\u5e74\uff0cEUV\uff08\u6975\u7d2b\u5916\u5149\uff09\u6210\u70ba\u7a81\u7834\u7684\u5229\u5668\uff0c\u5b83\u7684\u6ce2\u9577\u50c513.5\u5948\u7c73\uff0c\u80fd\u523b\u756b\u51fa\u6bd4\u982d\u9aee\u76f4\u5f91\u5c0f\u4e0a\u5343\u500d\u7684\u96fb\u8def\u7d30\u7bc0\uff0c\u7136\u800c\uff0c\u9019\u9805\u6280\u8853\u4e26\u975e\u553e\u624b\u53ef\u5f97\uff1a\u5f9e\u52d5\u8f12\u6578\u5104\u7f8e\u5143\u7684\u8a2d\u5099\u6210\u672c\uff0c\u5230\u9700\u8981\u771f\u7a7a\u8207\u7279\u6b8a\u53cd\u5c04\u93e1\u7684\u56b4\u82db\u689d\u4ef6\uff0c\u518d\u5230\u5149\u7f69\u6aa2\u6e2c\u7684\u7e41\u8907\u624b\u7e8c\uff0c\u6bcf\u4e00\u6b65\u90fd\u727d\u52d5\u8457\u534a\u5c0e\u9ad4\u88fd\u7a0b\u7684\u6548\u80fd\u8207\u826f\u7387\uff0c\u7136\u800c\uff0c2025\u5e74\u958b\u59cb\uff0c\u53f0\u7a4d\u96fb\u5df2\u7d93\u66f4\u9032\u4e00\u6b65\u7387\u5148\u5f15\u9032High-NA EUV\uff0c\u5c07\u63a8\u52d5\u88fd\u7a0b\u9032\u51652\u5948\u7c73\u4ee5\u4e0b\u7684\u6642\u4ee3\uff0c\u5728\u9019\u5834\u534a\u5c0e\u9ad4\u7684\u7af6\u8cfd\u4e2d\uff0c\u8ab0\u6709\u529f\u592b\u80fd\u7387\u5148\u99d5\u99ad\u9019\u9053\u6700\u5f37\u5149\u675f\uff0c\u5c31\u638c\u63e1\u4e86\u672a\u4f86\u5341\u5e74\u7684\u534a\u5c0e\u9ad4\u9738\u4e3b\u5730\u4f4d\u3002<\/strong><\/span><\/p>\n

\u64b0\u6587\uff5c\u9ec3\u9f0e\u921e<\/strong><\/p>\n

\u6df1\u7d2b\u5916\u5149 (Deep Ultraviolet, DUV) \u5fae\u5f71\u88fd\u7a0b\u81ea1990\u5e74\u4ee3\u8d77\u6210\u70ba\u4e3b\u6d41\uff0c\u6ce2\u9577193\u5948\u7c73\u7684ArF \u5149\u6e90\u6490\u8d77\u4e86\u5c07\u8fd1\u4e8c\u5341\u5e74\u7684\u6469\u723e\u5b9a\u5f8b\uff0c\u5728\u9762\u81e8\u5fae\u7e2e\u74f6\u9838\u4e4b\u6642\uff0c\u53f0\u7a4d\u96fb\u900f\u904e\u300c\u6d78\u6f64\u5f0f\u5149\u523b\u300d\u6280\u8853\uff0c\u5c07\u6298\u5c04\u7387\u70ba1.43\u7684\u8d85\u7d14\u6c34\u5f15\u5165\u93e1\u982d\u8207\u6676\u5713\u4e4b\u9593\uff0c\u70baDUV\u7684\u4f7f\u7528\u6253\u4e86\u5ef6\u9577\u8cfd\uff0c\u7136\u800c\uff0cRayleigh\u516c\u5f0f\u544a\u8a34\u6211\u5011\uff1a<\/p>\n

\"\"<\/p>\n

\u8981\u518d\u5ea6\u7e2e\u5c0f\u7dda\u5bec\uff0c\u50c5\u9760NA\u7684\u63d0\u5347\u5df2\u7d93\u4e0d\u8db3\uff0c\u5de5\u7a0b\u5e2b\u5fc5\u9808\u5c0b\u627e\u66f4\u77ed\u7684\u6ce2\u9577\u03bb\uff0c\u624d\u80fd\u63d0\u9ad8\u89e3\u6790\u5ea6\uff0c\u5927\u5e45\u5730\u63a8\u52d5\u534a\u5c0e\u9ad4\u88fd\u7a0b\u8de8\u4e16\u4ee3\u767c\u5c55\uff0c\u800c\u6210\u70ba\u65b0\u4e00\u4ee3\u88fd\u7a0b\u5fae\u7e2e\u5229\u5668\u7684\u5c31\u662f\u6ce2\u9577\u50c5\u670913.5\u5948\u7c73\u7684\u6975\u7d2b\u5916\u5149 (Extreme Ultraviolet, EUV)\u3002<\/p>\n

\"\"
\u57161\uff1aEUV\u7cfb\u7d71\u793a\u610f\u5716\uff5c\u4f86\u6e90\uff1a\u6539\u7de8\u81eaDALL-E AI<\/figcaption><\/figure>\n

 <\/p>\n

\u70ba\u4ec0\u9ebc\u904e\u53bbEUV<\/strong>\u5fae\u5f71\u7cfb\u7d71\u9072\u9072\u7121\u6cd5\u843d\u5730\uff1f<\/strong><\/span><\/h6>\n

EUV\u7684\u5c0e\u5165\u56f0\u96e3\u9996\u5148\u4f86\u81ea\u6210\u672c\uff0c\u76f8\u6bd4\u4e4b\u4e0b\uff0c\u50b3\u7d71 DUV\u5149\u523b\u6a5f\u6bcf\u81fa\u7d04\u97005,000\u842c\u7f8e\u5143\uff0c\u800cEUV\u6a5f\u81fa\u7684\u552e\u50f9\u5247\u9ad8\u90541.5\u5104\u7f8e\u5143\u4ee5\u4e0a\uff0c\u4e14\u6a5f\u81fa\u9ad4\u7a4d\u76f8\u7576\u65bc\u4e00\u8f1b\u5df4\u58eb\uff0c\u9700\u8981\u5c08\u9580\u7684\u5ee0\u623f\u57fa\u790e\u8a2d\u65bd\u624d\u80fd\u5b89\u88dd\uff0c\u6b64\u5916\uff0cEUV\u7684\u80fd\u8017\u4e5f\u9060\u9ad8\u65bcDUV\uff1a\u4e00\u81faEUV\u6a5f\u81fa\u8017\u96fb\u7d041.3MW\uff0c\u800cDUV\u50c5\u7d040.13MW\uff0c\u76f8\u5dee\u9054\u5341\u500d\uff0c\u4e0d\u50c5\u5982\u6b64\uff0c\u8017\u6750\u3001\u7dad\u8b77\u8207\u6aa2\u6e2c\u6210\u672c\u4ea6\u5927\u5e45\u589e\u52a0\uff0c\u53ea\u6709\u8cc7\u672c\u96c4\u539a\u3001\u7522\u80fd\u9f90\u5927\u7684\u6676\u5713\u5ee0\uff0c\u624d\u80fd\u8ca0\u64d4EUV\u7684\u4f7f\u7528\uff0c\u4e5f\u56e0\u6b64\u5ef6\u9072\u4e86EUV\u771f\u6b63\u843d\u5730\u7684\u6642\u9593\u3002\u76f4\u5230\u8fd1\u5e74\uff0c\u96a8\u8457\u667a\u6167\u578b\u624b\u6a5f\u3001AI\u3001\u96f2\u7aef\u904b\u7b97\u7b49\u65b0\u8208\u61c9\u7528\u64f4\u5927\u4e86\u5e02\u5834\u898f\u6a21\uff0c\u4f7f\u5f97\u55ae\u9846\u6676\u7247\u7684\u50f9\u503c\u8db3\u4ee5\u6524\u5e73\u9019\u7b46\u6210\u672c\uff0c\u63db\u53e5\u8a71\u8aaa\uff0cEUV\u5c45\u9ad8\u4e0d\u4e0b\u7684\u6210\u672c\uff0c\u6700\u7d42\u662f\u5728\u5e02\u5834\u9700\u6c42\u8207\u7522\u696d\u898f\u6a21\u7684\u63a8\u52d5\u4e0b\u624d\u6709\u6a5f\u6703\u843d\u5730\u3002<\/p>\n

\u9664\u4e86\u6210\u672c\u4e4b\u5916\uff0cEUV\u7684\u767c\u5c55\u9084\u6709\u4e00\u7cfb\u5217\u5149\u5b78\u6311\u6230\uff0c\u9996\u5148\uff0c13.5\u5948\u7c73\u7684\u6975\u7d2b\u5916\u5149\u80fd\u91cf\u6975\u9ad8\uff0c\u6613\u8207\u7a7a\u6c23\u5206\u5b50\u4f5c\u7528\uff0c\u56e0\u6b64\u6574\u500b\u7cfb\u7d71\u5fc5\u9808\u5728\u8d85\u9ad8\u771f\u7a7a\u74b0\u5883\u4e0b\u904b\u4f5c\uff0c\u5176\u6b21\uff0c\u4e0d\u50cfDUV\u80fd\u7528\u77f3\u82f1\u900f\u93e1\u6298\u5c04\u6210\u50cf\uff0cEUV\u7684\u9ad8\u80fd\u5149\u7dda\u5e7e\u4e4e\u7121\u6cd5\u900f\u904e\u4efb\u4f55\u6750\u6599\u50b3\u8f38\u3001\u805a\u7126\u6216\u6210\u50cf\uff0c\u9019\u4e9b\u7279\u6027\u8b93\u7cfb\u7d71\u8a2d\u8a08\u96e3\u5ea6\u5927\u5e45\u63d0\u5347\u3002\u70ba\u4e86\u7a81\u7834\u9019\u4e9b\u9650\u5236\uff0c\u7522\u696d\u5c0e\u5165\u4e86\u591a\u5c64\u5e03\u62c9\u683c\u53cd\u5c04\u93e1\uff1a\u5728\u926c (Mo) \u8207\u77fd (Si) \u4ea4\u66ff\u5806\u758a\u768440\u201350\u5c64\u8584\u819c\u4e2d\uff0c\u5229\u7528\u5e03\u62c9\u683c\u7e5e\u5c04\u8207\u5e72\u6d89\u6548\u61c9\u4f86\u63d0\u9ad8\u53cd\u5c04\u7387\uff0c\u5373\u4f7f\u5982\u6b64\uff0c\u6bcf\u7247\u53cd\u5c04\u93e1\u7684\u53cd\u5c04\u7387\u4e5f\u50c5\u6709\u7d0470%\uff0c\u9019\u610f\u5473\u8457\u5373\u4f7f\u8a2d\u8a08\u518d\u7cbe\u7d30\uff0c\u80fd\u91cf\u4ecd\u6703\u5728\u9010\u5c64\u53cd\u5c04\u4e2d\u6d41\u5931\uff0c\u5149\u7dda\u5728\u591a\u6b21\u53cd\u5c04\u5f8c\u4ecd\u6703\u51fa\u73fe\u660e\u986f\u8017\u640d\u3002<\/p>\n

\"\"
\u57162\uff1a\u926c\u8207\u77fd\u4ea4\u932f\u7684\u53cd\u5c04\u93e1\u793a\u610f\u5716\u3002\u4f7fEUV\u5149\u900f\u904e\u7e5e\u5c04\u6548\u61c9\u4f86\u5f62\u6210\u53cd\u5c04\u7684\u8def\u5f91\uff5c\u4f86\u6e90\uff1a\u4f5c\u8005\u63d0\u4f9b<\/figcaption><\/figure>\n

\u5149\u7f69\u672c\u8eab\u4e5f\u9762\u81e8\u65b0\u7684\u6311\u6230\uff0c\u7531\u65bc\u6ce2\u9577\u8d8a\u77ed\u5c0d\u7f3a\u9677\u7684\u654f\u611f\u5ea6\u5c31\u8d8a\u9ad8\uff0c\u5948\u7c73\u7d1a\u7684\u9846\u7c92\u6216\u51f9\u9677\u90fd\u6703\u900f\u904e\u7e5e\u5c04\u6548\u61c9\u653e\u5927\uff0c\u9020\u6210\u5716\u6848\u908a\u754c\u6a21\u7cca\uff0c\u4e26\u5728\u5f8c\u7e8c\u4e0a\u5343\u9053\u88fd\u7a0b\u4e2d\u9010\u6b65\u88ab\u8a87\u5f35\u653e\u5927\uff0c\u6700\u7d42\u53ef\u80fd\u5c0e\u81f4\u6574\u7247\u6676\u5713\u5831\u5ee2\uff0c\u56e0\u6b64\u91dd\u5c0d\u5149\u7f69\u54c1\u8cea\u7684\u628a\u95dc\u5fc5\u9808\u66f4\u56b4\u683c\u3002\u5728DUV\u6642\u4ee3\uff0c\u5de5\u7a0b\u5e2b\u80fd\u76f4\u63a5\u5229\u7528DUV\u5149\u6e90\u5c0d\u5149\u7f69\u5716\u5f62\u505a\u900f\u5c04\u5f0f\u6aa2\u67e5\uff0c\u5feb\u901f\u78ba\u8a8d\u5716\u6848\u662f\u5426\u6b63\u78ba\uff1b\u7136\u800c\u5728EUV\u6ce2\u6bb5\uff0c\u5149\u7dda\u7121\u6cd5\u900f\u5c04\u6750\u6599\uff0c\u56e0\u6b64\u50b3\u7d71\u6aa2\u67e5\u65b9\u5f0f\u5931\u6548\uff0c\u5de5\u7a0b\u5e2b\u9700\u984d\u5916\u4f7f\u7528\u96fb\u5b50\u675f (e-beam) \u6216\u5176\u4ed6\u9ad8\u80fd\u6aa2\u6e2c\u8a2d\u5099\u9010\u9ede\u6383\u63cf\uff0c\u9019\u6a23\u7684\u65b9\u6cd5\u65e2\u901f\u5ea6\u7de9\u6162\u4e14\u5927\u5e45\u589e\u52a0\u6210\u672c\u3002\u9019\u4e9b\u56f0\u5883\u90fd\u51f8\u986f\u51fa\u4e86EUV\u7684\u767c\u5c55\u4e26\u975e\u4e00\u8e74\u53ef\u5e7e\uff0c\u9664\u4e86\u9700\u8981\u5927\u91cf\u8cc7\u91d1\u7684\u6295\u5165\uff0c\u9084\u9700\u8981\u5404\u7522\u696d\u7684\u651c\u624b\u5408\u4f5c\u3002<\/p>\n

 <\/p>\n

AI<\/strong>\u4e5f\u80fd\u52a9\u5fae\u5f71\u88fd\u7a0b\u4e00\u81c2\u4e4b\u529b\uff1f<\/strong><\/span><\/h6>\n

\u96a8\u8457\u4eba\u5de5\u667a\u6167\u7684\u9032\u6b65\uff0c\u6f14\u7b97\u6cd5\u958b\u59cb\u5728\u5149\u7f69\u8a2d\u8a08\u4e2d\u767c\u63ee\u4f5c\u7528\uff0c\u9019\u4e00\u90e8\u5206\u7684\u5de5\u4f5c\u5927\u591a\u805a\u7126\u5728\u5149\u5b78\u9130\u8fd1\u6548\u61c9 (Optical Proximity Correction, OPC)\uff0c\u7576\u5149\u7dda\u7d93\u904e\u5149\u7f69\u7167\u5c04\u5230\u6676\u5713\u6642\uff0c\u4e0d\u53ef\u9810\u671f\u767c\u751f\u7684\u7e5e\u5c04\u6216\u6563\u5c04\u90fd\u6703\u4f7f\u5716\u6848\u51fa\u73fe\u504f\u5dee\uff0c\u4e5f\u5c31\u662f\u8aaa\u771f\u5be6\u66dd\u5149\u7684\u5716\u6848\u6703\u8207\u5149\u7f69\u4e0a\u539f\u5148\u8a2d\u8a08\u7684\u5716\u6848\u4e0d\u540c\uff0c\u56e0\u6b64\uff0c\u5de5\u7a0b\u5e2b\u5728\u8a2d\u8a08\u5149\u7f69\u6642\uff0c\u6703\u6545\u610f\u628a\u5716\u6848\u7dda\u689d\u300c\u756b\u6b6a\u4e00\u9ede\u300d\uff0c\u4f8b\u5982\u7a0d\u5fae\u52a0\u7c97\u3001\u7e2e\u77ed\u6216\u589e\u52a0\u8f14\u52a9\u5c0f\u5716\u6848\uff0c\u8b93\u66dd\u5149\u5f8c\u7684\u7d50\u679c\u53cd\u800c\u66f4\u63a5\u8fd1\u539f\u672c\u60f3\u8981\u7684\u5f62\u72c0\uff0c\u50cf\u5728\u5370\u7ae0\u96d5\u523b\u6642\uff0c\u5148\u628a\u5b57\u523b\u5f97\u602a\u602a\u7684\uff0c\u84cb\u51fa\u4f86\u53cd\u800c\u6b63\u597d\uff0c\u81f3\u65bc\u8981\u756b\u5f97\u591a\u6b6a\u624d\u80fd\u5f97\u5230\u9810\u671f\u7684\u5716\u6848\uff0c\u5247\u9700\u8981\u85c9\u7531\u7d93\u9a57\u7684\u7d2f\u7a4d\u4f86\u4fee\u6b63\uff0c\u7136\u800c\uff0c\u7576\u7dda\u5bec\u7e2e\u5c0f\u5230\u5948\u7c73\u7b49\u7d1a\uff0c\u5149\u5b78\u6548\u61c9\u8b8a\u5f97\u975e\u5e38\u8907\u96dc\uff0c\u4eba\u5de5\u7d93\u9a57\u65b9\u6cd5\u5df2\u7d93\u7121\u6cd5\u61c9\u4ed8\uff0c\u9019\u6642\uff0cAI\u6f14\u7b97\u6cd5\u5c31\u80fd\u6d3e\u4e0a\u7528\u5834\uff0c\u5b83\u80fd\u900f\u904e\u5b78\u7fd2\u5927\u91cf\u7684\u66dd\u5149\u8207\u6210\u50cf\u6578\u64da\uff0c\u81ea\u52d5\u627e\u51fa\u6700\u4f73\u7684\u4fee\u6b63\u65b9\u5f0f\uff0c\u4e26\u5728\u88fd\u7a0b\u4e2d\u5373\u6642\u8abf\u6574\uff0c\u9019\u6a23\u4e0d\u50c5\u52a0\u5feb\u8a2d\u8a08\u901f\u5ea6\uff0c\u4e5f\u80fd\u78ba\u4fdd\u5927\u91cf\u751f\u7522\u6642\u7684\u7a69\u5b9a\u6027\u548c\u826f\u7387\u3002<\/p>\n

\"\"
\u57163 (a) \u5149\u5b78\u9130\u8fd1\u6548\u61c9\u793a\u610f\u5716\uff0c\u92d2\u5229\u7684\u5716\u6848\u53cd\u800c\u6703\u9020\u6210\u66dd\u5149\u5716\u6848\u8b8a\u5f62\uff0c\u4f46\u82e5\u900f\u904e\u5149\u5b78\u4fee\u6b63\u7684\u8a2d\u8a08\uff0c\u53cd\u800c\u53ef\u4ee5\u5f97\u5230\u92b3\u5229\u7684\u66dd\u5149\u5716\u6848\uff1b(b) \u975e\u7b49\u6bd4\u5149\u5b78\u8a2d\u8a08\u793a\u610f\u5716\u3002\u63d0\u9ad8\u5165\u5c04\u89d2\u5ea6\uff0c\u6e1b\u5c11\u5149\u7dda\u64f4\u6563\uff0c\u540c\u6642\u5229\u7528\u9023\u7e8c\u7684\u5169\u6b21\u6216\u591a\u6b21\u7684\u66dd\u5149\u5c07\u5716\u6848\u62fc\u63a5\u8d77\u4f86\uff0c\u85c9\u6b64\u4f86\u63d0\u9ad8\u66dd\u5149\u89e3\u6790\u5ea6(NA)\uff5c\u4f86\u6e90\uff1a\u4f5c\u8005\u63d0\u4f9b<\/figcaption><\/figure>\n

 <\/p>\n

\u6700\u65b0\u7684\u6230\u5834\uff1aHigh-NA EUV<\/strong><\/span><\/h6>\n

2025\u5e74\u958b\u59cb\uff0cHigh-NA EUV\u7684\u534a\u5c0e\u9ad4\u88fd\u7a0b\u7af6\u8cfd\u5168\u9762\u5c55\u958b\uff0c\u800c\u53f0\u7a4d\u96fb\u9996\u5148\u53d6\u5f97\u4e86\u7531ASML\uff08\u8377\u862d\u827e\u53f8\u6469\u723e\u516c\u53f8\uff09\u6240\u7814\u767c\u7684High-NA EUV\uff0c\u64da\u5831\u5c0e\u5176\u4ed6\u76f8\u95dc\u516c\u53f8\u5982Intel, Samsung\u4e5f\u5c07\u5728\u672c\u5e74\u5ea6\u5f15\u5165\u8a72\u6a5f\u578b\u3002ASML\u662f\u5982\u4f55\u5728\u65e2\u6709\u7684EUV\u67b6\u69cb\u4e2d\uff0c\u518d\u6b21\u63d0\u5347\u5176\u88fd\u7a0b\u89e3\u6790\u5ea6\u7684\u5462\uff1f\u7531\u65bcNA\u503c\u53d7\u5165\u5c04\u89d2\u5ea6\u7684\u5f71\u97ff\uff0c\u82e5\u80fd\u63d0\u9ad8\u5149\u5165\u5c04\u89d2\u5ea6\uff0cNA\u5c31\u80fd\u63d0\u9ad8\uff0c\u6240\u4ee5ASML\u5229\u7528\u300c\u975e\u7b49\u6bd4\u5149\u5b78\u8a2d\u8a08\u300d (anamorphic optics)\uff0c\u5c31\u662f\u5728X\u8207Y\u65b9\u5411\u4e0a\u4f7f\u7528\u4e0d\u540c\u7684\u653e\u5927\u500d\u7387\uff0c\u597d\u6bd4\u628a\u756b\u9762\u6c34\u5e73\u62c9\u9577\u3001\u5782\u76f4\u58d3\u7e2e\uff0c\u9019\u6a23\u80fd\u5728\u63a7\u5236\u93e1\u7247\u5927\u5c0f\u7684\u540c\u6642\uff0c\u8b93\u5149\u7dda\u4ee5\u66f4\u5927\u7684\u89d2\u5ea6\u9032\u5165\u93e1\u7247\uff0c\u9032\u800c\u63d0\u5347 NA\uff0c\u7c21\u55ae\u4f86\u8aaa\uff0c\u539f\u672c\u4e00\u6b21\u53ef\u4ee5\u5b8c\u6574\u66dd\u5149\u4e00\u500b\u5f71\u50cf\u5340\u57df\uff0c\u4f46\u73fe\u5728\u5247\u662f\u4e00\u6b21\u53ea\u80fd\u66dd\u5149\u534a\u500b\u6676\u5713\u5834\uff0c\u518d\u900f\u904e\u5169\u6b21\u62fc\u63a5\u5b8c\u6210\u6574\u5f35\u5716\u6848\uff0c\u96d6\u7136\u589e\u52a0\u4e86\u88fd\u7a0b\u7684\u8907\u96dc\u5ea6\uff0c\u537b\u63db\u4f86\u4e86\u89e3\u6790\u5ea6\u7684\u63d0\u5347\u3002<\/p>\n

High-NA EUV\u7684\u5fae\u7e2e\u7af6\u8cfd\u6b63\u5728\u63ed\u958b\u5e8f\u5e55\uff0c\u8ab0\u7684\u529f\u592b\u80fd\u99d5\u99ad\u597d\u9019\u9805\u6280\u8853\uff0c\u5c31\u6709\u6a5f\u6703\u7e7c\u7e8c\u5728\u9019\u7522\u696d\u4e2d\u6210\u70ba\u9818\u982d\u7f8a\uff01<\/p>\n

 <\/p>\n

\n

\u53c3\u8003\u6587\u737b<\/strong><\/p>\n

    \n
  1. Reuters. (2024, April 17). Semiconductor equipment maker ASML ships second High-NA EUV machine.<\/em> Reuters.<\/a><\/li>\n
  2. WaferScope. (n.d.). DUV vs EUV: What\u2019s the real difference in chipmaking?<\/em> WaferScope. Retrieved September 10, 2025.<\/a><\/li>\n
  3. Hofman, S. (2022, March 30). Making EUV: from lab to fab<\/em>. ASML.<\/a><\/li>\n
  4. NTT Advanced Technology Corporation. (2020). Multilayer Coating for Extreme Ultraviolet Experiments<\/em> (Technical report).<\/a><\/li>\n
  5. Chkhalo, N. I., Gusev, S. A., Nechay, A. N., Pariev, D. E., Polkovnikov, V. N., Salashchenko, N. N., Sch\u00e4fers, F., Sertsu, M. G., Sokolov, A., Svechnikov, M. V., & Tatarsky, D. A. (2017). High-reflection Mo\/Be\/Si multilayers for EUV lithography. Optics Letters, 42<\/em>(24), 5070\u20135073.<\/a><\/li>\n
  6. Lin, A., Rawat, T., Chang, C. Y., Tung, H. C., Liu, H. L., & Yu, P. (2022). Optical proximity correction using machine learning assisted human decision.IEEE Photonics Journal<\/em>,\u00a015<\/em>(1), 1-9.<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"

    \u5728\u6676\u7247\u5fae\u7e2e\u7684\u7af6\u8cfd\u4e2d\uff0c\u904e\u53bb\u516d\u5e74\uff0cEUV\uff08\u6975\u7d2b\u5916\u5149\uff09\u6210\u70ba\u7a81\u7834\u7684\u5229\u5668\uff0c\u5b83\u7684\u6ce2\u9577\u50c513.5\u5948\u7c73\uff0c\u80fd\u523b\u756b\u51fa\u6bd4\u982d\u9aee\u76f4\u5f91\u5c0f\u4e0a\u5343\u500d\u7684\u96fb\u8def\u7d30\u7bc0\uff0c\u7136\u800c\uff0c\u9019\u9805\u6280\u8853\u4e26\u975e\u553e\u624b\u53ef\u5f97\uff1a\u5f9e\u52d5\u8f12\u6578\u5104\u7f8e\u5143\u7684\u8a2d\u5099\u6210\u672c\uff0c\u5230\u9700\u8981\u771f\u7a7a\u8207\u7279\u6b8a\u53cd\u5c04\u93e1\u7684\u56b4\u82db\u689d\u4ef6\uff0c\u518d\u5230\u5149\u7f69\u6aa2\u6e2c\u7684\u7e41\u8907\u624b\u7e8c\uff0c\u6bcf\u4e00\u6b65\u90fd\u727d\u52d5\u8457\u534a\u5c0e\u9ad4\u88fd\u7a0b\u7684\u6548\u80fd\u8207\u826f\u7387\uff0c\u7136\u800c\uff0c2025\u5e74\u958b\u59cb\uff0c\u53f0\u7a4d\u96fb\u5df2\u7d93\u66f4\u9032\u4e00\u6b65\u7387\u5148\u5f15\u9032High-NA EUV\uff0c\u5c07\u63a8\u52d5\u88fd\u7a0b\u9032\u51652\u5948\u7c73\u4ee5\u4e0b\u7684\u6642\u4ee3\uff0c\u5728\u9019\u5834\u534a\u5c0e\u9ad4\u7684\u7af6\u8cfd\u4e2d\uff0c\u8ab0\u6709\u529f\u592b\u80fd\u7387\u5148\u99d5\u99ad\u9019\u9053\u6700\u5f37\u5149\u675f\uff0c\u5c31\u638c\u63e1\u4e86\u672a\u4f86\u5341\u5e74\u7684\u534a\u5c0e\u9ad4\u9738\u4e3b\u5730\u4f4d\u3002<\/p>\n","protected":false},"author":20,"featured_media":45769,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[1023,3293,39],"tags":[7442,7443,5103,7441],"aioseo_notices":[],"jetpack_featured_media_url":"https:\/\/case.ntu.edu.tw\/blog\/wp-content\/uploads\/2025\/09\/\u5716\u7247-1-scaled.jpg","_links":{"self":[{"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=\/wp\/v2\/posts\/45765"}],"collection":[{"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=\/wp\/v2\/users\/20"}],"replies":[{"embeddable":true,"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=45765"}],"version-history":[{"count":1,"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=\/wp\/v2\/posts\/45765\/revisions"}],"predecessor-version":[{"id":45770,"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=\/wp\/v2\/posts\/45765\/revisions\/45770"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=\/wp\/v2\/media\/45769"}],"wp:attachment":[{"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=45765"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=45765"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=45765"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}