{"id":45719,"date":"2025-09-09T18:00:29","date_gmt":"2025-09-09T10:00:29","guid":{"rendered":"https:\/\/case.ntu.edu.tw\/blog\/?p=45719"},"modified":"2025-09-09T10:56:41","modified_gmt":"2025-09-09T02:56:41","slug":"%e3%80%90%e5%be%ae%e5%bd%b1%e8%a3%bd%e7%a8%8b%e5%a4%a7%e8%a7%a3%e5%af%86%e3%80%911-%e7%95%b6%e5%b9%b4%e5%8f%b0%e7%a9%8d%e9%9b%bb%e5%a6%82%e4%bd%95%e5%bd%8e%e9%81%93%e8%b6%85","status":"publish","type":"post","link":"https:\/\/case.ntu.edu.tw\/blog\/?p=45719","title":{"rendered":"\u3010\u5fae\u5f71\u88fd\u7a0b\u5927\u89e3\u5bc6\u3011(1)\u2014\u2014\u7576\u5e74\u53f0\u7a4d\u96fb\u5982\u4f55\u5f4e\u9053\u8d85\u8eca\uff1f"},"content":{"rendered":"

\u5728\u986f\u5fae\u93e1\u4e0b\uff0c\u534a\u5c0e\u9ad4\u6676\u7247\u5b9b\u5982\u4e00\u5ea7\u7e2e\u5fae\u57ce\u5e02\uff0c\u6bcf\u689d\u300c\u9053\u8def\u300d\u90fd\u6bd4\u982d\u9aee\u7684\u5343\u5206\u4e4b\u4e00\u9084\u8981\u7d30\u5fae\u3002\u5de5\u7a0b\u5e2b\u662f\u5982\u4f55\u5728\u5982\u6b64\u5fae\u5c0f\u7684\u5c3a\u5ea6\u4e0a\uff0c\u6253\u9020\u51fa\u9019\u4e9b\u7cbe\u5bc6\u7684\u96fb\u8def\u7db2\u7d61\u5462\uff1f\u7b54\u6848\u5c31\u5728\u5fae\u5f71\u88fd\u7a0b\u3002\u9019\u9805\u6280\u8853\u5c31\u50cf\u5948\u7c73\u96d5\u523b\u5e2b\uff0c\u4e0d\u65b7\u7a81\u7834\u7269\u7406\u8207\u5de5\u7a0b\u7684\u9650\u5236\uff0c\u8b93\u540c\u6a23\u5927\u5c0f\u7684\u6676\u7247\u80fd\u5bb9\u7d0d\u66f4\u591a\u7684\u96fb\u6676\u9ad4\u8207\u529f\u80fd\u6a21\u7d44\uff0c\u9032\u800c\u63d0\u5347\u904b\u7b97\u901f\u5ea6\u8207\u964d\u4f4e\u529f\u8017\u3002\u672c\u6587\u5c07\u5e36\u9818\u8b80\u8005\u8d70\u9032\u5fae\u5f71\u88fd\u7a0b\u7684\u4e16\u754c\uff0c\u63a2\u7d22\u5b83\u7684\u79d1\u5b78\u539f\u7406\u8207\u6f14\u9032\u6b77\u7a0b\uff0c\u4e26\u4ee5\u6b64\u8996\u89d2\u56de\u9867\u53f0\u7a4d\u96fb\u5982\u4f55\u57282004\u5e74\u6191\u85c9\u5275\u65b0\u7684\u6d78\u6f64\u5f0f\u5fae\u5f71\u6280\u8853\uff0c\u6210\u529f\u8d85\u8eca\u5168\u7403\u534a\u5c0e\u9ad4\u696d\uff0c\u8e8d\u5347\u70ba\u696d\u754c\u7684\u9818\u822a\u8005\u3002<\/strong><\/span><\/p>\n

\u64b0\u6587\uff5c\u9ec3\u9f0e\u921e<\/strong><\/p>\n

\u60f3\u50cf\u4e00\u5ea7\u57ce\u5e02\uff1a\u9ad8\u6a13\u6797\u7acb\u3001\u9053\u8def\u4ea4\u932f\u3001\u6a4b\u6a11\u9023\u7d50\u5404\u8655\uff0c\u73fe\u5728\uff0c\u628a\u9019\u5ea7\u57ce\u5e02\u7e2e\u5c0f\u5230\u4e00\u6839\u982d\u9aee\u76f4\u5f91\u7684\u5343\u5206\u4e4b\u4e00\uff0c\u6a13\u623f\u8b8a\u6210\u96fb\u6676\u9ad4\uff0c\u9053\u8def\u662f\u91d1\u5c6c\u9023\u7dda\uff0c\u6a4b\u6a11\u662f\u5c0e\u96fb\u7684\u63a5\u9ede\uff0c\u5de5\u7a0b\u5e2b\u8981\u600e\u9ebc\u5728\u9019\u9ebc\u5c0f\u7684\u4e16\u754c\u88e1\uff0c\u7cbe\u78ba\u5730\u5efa\u9020\u9019\u4e9b\u7d50\u69cb\uff1f\u7b54\u6848\u662f\u2014\u5fae\u5f71\u88fd\u7a0b (photolithography)\u3002\u9019\u9580\u6280\u8853\u5c31\u50cf\u300c\u5948\u7c73\u96d5\u523b\u5e2b\u300d\uff0c\u5229\u7528\u5149\u7576\u4f5c\u96d5\u523b\u5200\uff0c\u5728\u6676\u5713\u8868\u9762\u300c\u63cf\u7e6a\u300d\u96fb\u8def\u5716\u6848\uff0c\u5b83\u7684\u7cbe\u6e96\u7a0b\u5ea6\uff0c\u6c7a\u5b9a\u4e86\u4e00\u9846\u6676\u7247\u80fd\u5bb9\u7d0d\u591a\u5c11\u5143\u4ef6\uff0c\u4e5f\u6c7a\u5b9a\u4e86\u904b\u7b97\u901f\u5ea6\u3001\u529f\u8017\u8207\u6210\u672c\uff0c\u56e0\u70ba\u5fae\u5f71\u88fd\u7a0b\u7684\u767c\u5c55\uff0c\u73fe\u4eca\u7684\u79d1\u6280\u624d\u5f97\u4ee5\u98db\u5feb\u7684\u9032\u6b65\u3002<\/p>\n

\"\"
\u57161\uff1a\u534a\u5c0e\u9ad4\u6676\u7247\u7cbe\u5bc6\u5e03\u5c40\u793a\u610f\u5716\uff5c\u4f86\u6e90\uff1aDALL-E AI<\/figcaption><\/figure>\n

 <\/p>\n

\u5fae\u5f71\u88fd\u7a0b\u7684\u539f\u7406\u8207\u7269\u7406\u6975\u9650<\/strong><\/span><\/h6>\n

\u5fae\u5f71\u88fd\u7a0b\u7684\u904b\u4f5c\u539f\u7406\u4e3b\u8981\u6709\u4ee5\u4e0b\u9019\u4e9b\u6b65\u9a5f\uff0c\u9996\u5148\uff0c\u5728\u6676\u5713\u8868\u9762\u5857\u4e0a\u4e00\u5c64\u5c0d\u5149\u654f\u611f\u7684\u6750\u6599\uff0c\u7a31\u70ba\u5149\u963b\uff0c\u5c31\u50cf\u50b3\u7d71\u76f8\u6a5f\u7684\u5e95\u7247\u4e00\u6a23\u6703\u5c0d\u5149\u7522\u751f\u5316\u5b78\u8b8a\u5316\u3002\u63a5\u8457\uff0c\u900f\u904e\u523b\u6709\u96fb\u8def\u5716\u6848\u7684\u5149\u7f69\uff0c\u5149\u7dda\u53ea\u5728\u7279\u5b9a\u5340\u57df\u7167\u5c04\u5230\u5149\u963b\uff0c\u628a\u96fb\u8def\u5f62\u72c0\u300c\u5370\u4e0a\u53bb\u300d\u3002\u6700\u5f8c\u9032\u884c\u986f\u5f71\uff0c\u6839\u64da\u5149\u963b\u7a2e\u985e\uff0c\u66dd\u5149\u5340\u57df\u53ef\u80fd\u6703\u88ab\u6eb6\u89e3\uff08\u6b63\u5149\u963b\uff09\u6216\u88ab\u4fdd\u7559\uff08\u8ca0\u5149\u963b\uff09\uff0c\u7559\u4e0b\u6240\u9700\u7684\u5716\u6848\u3002\u9019\u4e9b\u6b65\u9a5f\u6703\u53cd\u8986\u9032\u884c\uff0c\u4e26\u914d\u5408\u8755\u523b\u8207\u6c89\u7a4d\u7b49\u88fd\u7a0b\uff0c\u6700\u7d42\u5c64\u5c64\u5806\u758a\u51fa\u5b8c\u6574\u7684\u6676\u7247\u7d50\u69cb\u3002<\/p>\n

\"\"
\u57162\uff1a\u5fae\u5f71\u88fd\u7a0b\u793a\u610f\u5716\u3002\u7d2b\u5916\u5149 (UV light) \u900f\u904e\u523b\u6709\u96fb\u8def\u5716\u6848\u7684\u5149\u7f69 (Mask) \u7167\u5c04\u5230\u5857\u6709\u5149\u963b (Resist) \u7684\u6676\u5713\u8868\u9762\uff0c\u4e0d\u540c\u5149\u963b\u985e\u578b\uff08\u6b63\u5149\u963b (positive resist) \u8207\u8ca0\u5149\u963b (Negative resist)\uff09\u5728\u66dd\u5149\u8207\u986f\u5f71\u5f8c\uff0c\u5f62\u6210\u6240\u9700\u7684\u5716\u6848\uff0c\u5f8c\u7e8c\u53ef\u9032\u884c\u8755\u523b (Etch-back) \u6216\u91d1\u5c6c\u6c89\u7a4d\u8207\u525d\u96e2 (Lift-off) \uff0c\u4ee5\u69cb\u5efa\u6676\u7247\u7d50\u69cb\uff5c\u4f86\u6e90\uff1a\u4f5c\u8005\u63d0\u4f9b<\/figcaption><\/figure>\n

\u63a5\u8457\uff0c\u4f60\u53ef\u80fd\u6703\u597d\u5947\uff0c\u90a3\u9ebc\u9019\u4e9b\u5716\u6848\u53ef\u4ee5\u505a\u5230\u591a\u5c0f\u5462\uff1f\u9019\u5c31\u8981\u5f9e Rayleigh \u516c\u5f0f\u8ac7\u8d77\u3002\u9996\u5148\uff0c\u539f\u59cb\u7684 Rayleigh \u516c\u5f0f\u5beb\u4f5c\uff1a<\/p>\n

R=k \u03bb<\/em><\/p>\n

\u9019\u88e1R<\/em>\u662f\u6700\u5c0f\u53ef\u6210\u50cf\u7dda\u5bec\uff0c\u03bb<\/em>\u662f\u5149\u7684\u6ce2\u9577\uff0ck<\/em>\u662f\u8207\u5149\u5b78\u7cfb\u7d71\u8207\u88fd\u7a0b\u76f8\u95dc\u7684\u7d93\u9a57\u5e38\u6578\uff0c\u5f71\u97ffk<\/em>\u7684\u56e0\u7d20\u5f88\u591a\uff0c\u5305\u62ec\u5149\u7f69\u8a2d\u8a08\u3001\u66dd\u5149\u689d\u4ef6\u3001\u5149\u963b\u8207\u88fd\u7a0b\u63a7\u5236\u7b49\uff0c\u4f46\u5728\u5be6\u969b\u88fd\u7a0b\u4e2d\uff0c\u5c0d\u89e3\u6790\u5ea6\u5f71\u97ff\u6700\u986f\u8457\u7684\uff0c\u662f\u5f71\u97ff\u805a\u5149\u80fd\u529b\u7684NA <\/em>(Numerical Aperture)\uff0c\u56e0\u6b64\u696d\u754c\u5e38\u5c07\u516c\u5f0f\u6539\u5beb\u70ba\uff1a<\/p>\n

\"\"<\/p>\n

\u5176\u4e2dNA<\/em>\u5247\u7531NA=nsin\u03b8<\/em>\u5b9a\u7fa9\uff0cn\u662f\u6295\u5f71\u4ecb\u8cea\u7684\u6298\u5c04\u7387\uff0c\u03b8<\/em>\u662f\u7cfb\u7d71\u53ef\u6536\u96c6\u5149\u7dda\u7684\u6700\u5927\u89d2\u5ea6\u3002\u63d0\u9ad8n<\/em>\u6216\u589e\u5927\u03b8<\/em>\uff0c\u90fd\u80fd\u8b93NA<\/em>\u4e0a\u5347\u3001\u89e3\u6790\u5ea6\u4e0a\u5347\uff08\u7dda\u5bec\u7e2e\u5c0f\uff09\uff0c\u523b\u756b\u51fa\u66f4\u7d30\u7684\u7dda\u5bec\u3002<\/p>\n

\u56e0\u6b64\u6bcf\u4e00\u500b\u534a\u5c0e\u9ad4\u4e16\u4ee3\u7684\u7a81\u7834\uff0c\u4e3b\u8981\u4f86\u81ea\u65bc\u65b0\u7684\u5149\u6e90\u6ce2\u9577 (\u03bb) \u7684\u7e2e\u77ed\uff0c\u6216\u662fNA<\/em>\u503c\u7684\u589e\u52a0\uff0c\u4ee5\u4e0b\u7684\u8868\u683c\u6574\u7406\u6bcf\u4e00\u500b\u534a\u5c0e\u9ad4\u4e16\u4ee3\u63a1\u7528\u7684\u5fae\u5f71\u88fd\u7a0b\u7684\u6ce2\u9577\u8207NA<\/em>\u503c\u3002<\/p>\n

\"\"
\u88681\uff1a\u5404\u4e16\u4ee3\u5fae\u5f71\u88fd\u7a0b\u7684\u95dc\u9375\u53c3\u6578\u8207\u9a45\u52d5\u56e0\u7d20\u6bd4\u8f03\u3002\u8868\u4e2d\u5217\u51fa\u4e0d\u540c\u4e16\u4ee3\u7684\u6280\u8853\u540d\u7a31\u3001\u554f\u4e16\u5e74\u5206\u3001\u66dd\u5149\u6ce2\u9577 (\u03bb)\u3001\u6578\u503c\u5b54\u5f91 (NA)\u3001\u4f9d\u64daRayleigh\u516c\u5f0f\u8a08\u7b97\u7684\u89e3\u6790\u5ea6R\uff0c\u4ee5\u53ca\u8a72\u4e16\u4ee3\u89e3\u6790\u5ea6\u63d0\u5347\u7684\u4e3b\u8981\u9a45\u52d5\u56e0\u7d20\uff08\u6ce2\u9577\u7e2e\u77ed\u6216NA\u63d0\u5347\uff09\u3002\u5f9eg-line\u5230High-NA EUV\uff0c\u5fae\u5f71\u6280\u8853\u6301\u7e8c\u900f\u904e\u5149\u6e90\u6ce2\u9577\u7684\u7e2e\u77ed\u8207\u6578\u503c\u5b54\u5f91\u7684\u589e\u52a0\uff0c\u63a8\u52d5\u534a\u5c0e\u9ad4\u7dda\u5bec\u4e0d\u65b7\u5fae\u7e2e\uff5c\u4f86\u6e90\uff1a\u4f5c\u8005\u63d0\u4f9b<\/figcaption><\/figure>\n

 <\/p>\n

\u53f0\u7a4d\u96fb\u5982\u4f55\u57282004<\/strong>\u5e74\u8d85\u8eca\u6210\u70ba\u5168\u7403\u9818\u5c0e\u8005<\/strong><\/span><\/h6>\n

2000\u5e74\u524d\u5f8c\uff0c\u696d\u754c\u4e3b\u6d41\u7684\u5fae\u5f71\u88fd\u7a0b\u5df2\u63a1\u7528193 nm\u6df1\u7d2b\u5916\u5149 (DUV)\uff0c\u4f46\u5728\u63d0\u5347\u89e3\u6790\u5ea6\u65b9\u9762\u9047\u5230\u74f6\u9838\uff0c\u56e0\u70ba\u63a1\u7528\u66f4\u77ed\u6ce2\u9577\u7684\u5149\u6e90\u9700\u8981\u4ed8\u51fa\u6975\u9ad8\u7684\u6210\u672c\u30022004\u5e74\uff0c\u534a\u5c0e\u9ad4\u754c\u8fce\u4f86\u4e00\u5834\u5283\u6642\u4ee3\u7684\u8f49\u6298\u2014\u6d78\u6f64\u5f0f\u5149\u523b (Immersion Lithography)\uff0c\u9019\u9805\u7531\u53f0\u7a4d\u96fb\u524d\u7814\u767c\u8cc7\u6df1\u526f\u7e3d\u6797\u672c\u5805\u535a\u58eb\u767c\u660e\u7684\u6280\u8853\uff0c\u5de7\u5999\u5730\u5728\u4e0d\u66f4\u63db193 nm\u5149\u6e90\u7684\u60c5\u6cc1\u4e0b\uff0c\u986f\u8457\u63d0\u5347\u4e86\u89e3\u6790\u5ea6\uff0c\u8b93\u53f0\u7a4d\u96fb\u5728\u6676\u7247\u5fae\u7e2e\u7af6\u8cfd\u4e2d\u8d85\u8d8a\u773e\u591a\u5c0d\u624b\uff0c\u5960\u5b9a\u4e86\u5168\u7403\u9818\u5148\u7684\u5730\u4f4d\u3002<\/p>\n

\u7576\u6642\u7684ArF DUV (dry) \u88fd\u7a0b\u4e2d\uff0c\u6295\u5f71\u93e1\u982d\u8207\u6676\u5713\u4e4b\u9593\u5145\u6eff\u7a7a\u6c23\uff0c\u6298\u5c04\u7387n=1\uff0cNA\u96e3\u4ee5\u7a81\u78341.0\uff0c\u6797\u672c\u5805\u535a\u58eb\u63d0\u51fa\u5c07\u7a7a\u6c23\u63db\u6210\u6298\u5c04\u7387\u7d04n\uff5e1.43\u7684\u8d85\u7d14\u6c34\uff0c\u4f9d\u64daRayleigh\u516c\u5f0f\uff0c\u89e3\u6790\u5ea6\u53ef\u63d0\u5347\u7d041.43\u500d\uff0c\u800c\u4e14\u7121\u9700\u66f4\u63db\u5149\u6e90\u6216\u5927\u5e45\u4fee\u6539\u8a2d\u5099\uff0c\u9019\u9805\u5275\u65b0\u8b93\u53f0\u7a4d\u96fb\u80fd\u5728\u76f8\u540c\u5149\u6e90\u4e0b\u523b\u756b\u66f4\u7d30\u7dfb\u7684\u7dda\u689d\uff0c\u5c07\u88fd\u7a0b\u63a8\u9032\u523040\u5948\u7c73\u751a\u81f3\u66f4\u5c0f\u3002\u4e0d\u904e\uff0c\u7406\u8ad6\u96d6\u7136\u7c21\u55ae\uff0c\u4f46\u5728\u5de5\u5ee0\u5be6\u73fe\u537b\u6975\u5176\u56f0\u96e3\uff0c\u8d85\u7d14\u6c34\u5fc5\u9808\u4fdd\u6301\u7121\u6c23\u6ce1\u3001\u7121\u96dc\u8cea\uff0c\u5426\u5247\u6703\u522e\u50b7\u6676\u5713\u6216\u5e72\u64fe\u6210\u50cf\uff1b\u5149\u5b78\u7cfb\u7d71\u9700\u8981\u91cd\u65b0\u8a2d\u8a08\uff0c\u4ee5\u907f\u514d\u6c34\u6d41\u5f15\u8d77\u9707\u52d5\uff1b\u88fd\u7a0b\u9084\u5fc5\u9808\u8207\u8755\u523b\u3001\u6c89\u7a4d\u7b49\u6578\u767e\u9053\u6b65\u9a5f\u7cbe\u6e96\u5339\u914d\uff0c\u800c\u53f0\u7a4d\u96fb\u7684\u529f\u592b\u6b63\u662f\u5728\u9019\u65b9\u9762\u5c55\u73fe\u4e86\u9a5a\u4eba\u7684\u5de5\u7a0b\u6574\u5408\u80fd\u529b\uff01<\/p>\n

\"\"
\u57163\uff1a\u6fd5\u5f0f\u5fae\u5f71\u88fd\u7a0b\u793a\u610f\u5716\uff0c\u85c9\u7531\u66f4\u63db\u900f\u93e1\u8207\u57fa\u677f\u4e4b\u9593\u7684\u4ecb\u8cea\uff0c\u5149\u675f\u80fd\u9032\u4e00\u6b65\u805a\u7126\uff0c\u9032\u800c\u9054\u5230\u66f4\u9ad8\u7684\u96fb\u8def\u5716\u6848\u89e3\u6790\u5ea6\uff5c\u4f86\u6e90\uff1a\u4f5c\u8005\u63d0\u4f9b<\/figcaption><\/figure>\n

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 <\/p>\n

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\u53c3\u8003\u6587\u737b<\/strong><\/p>\n

    \n
  1. Wu, Q., Li, Y., & Zhao, Y. (2020, November). The evolution of photolithography technology, process standards, and future outlook. In 2020 IEEE 15th International Conference on Solid-State & Integrated Circuit Technology (ICSICT)<\/em> (pp. 1-5). IEEE.<\/li>\n
  2. Lin, B. J. (2004). Immersion lithography and its impact on semiconductor manufacturing.Journal of Micro\/Nanolithography, MEMS and MOEMS<\/em>,\u00a03<\/em>(3), 377-395.<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"

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