{"id":44850,"date":"2024-11-26T18:00:45","date_gmt":"2024-11-26T10:00:45","guid":{"rendered":"https:\/\/case.ntu.edu.tw\/blog\/?p=44850"},"modified":"2024-11-26T13:55:35","modified_gmt":"2024-11-26T05:55:35","slug":"%e6%b0%ae%e5%8c%96%e9%8e%b5gan%e6%9c%89%e4%bb%80%e9%ba%bc%e5%8e%b2%e5%ae%b3%e7%9a%84%ef%bc%9f","status":"publish","type":"post","link":"https:\/\/case.ntu.edu.tw\/blog\/?p=44850","title":{"rendered":"\u6c2e\u5316\u93b5(GaN)\u6709\u4ec0\u9ebc\u53b2\u5bb3\u7684\uff1f"},"content":{"rendered":"

\u5e02\u9762\u4e0a\u6709\u8457\u8d8a\u4f86\u8d8a\u591a\u6c2e\u5316\u93b5\u7684\u96fb\u5b50\u7522\u54c1\uff0c\u92b7\u552e\u4eba\u54e1\u4e5f\u5e38\u6709\u81ea\u4fe1\u7684\u8aaa\uff1a\u300c\u6211\u5011\u7684\u7522\u54c1\u662f\u6c2e\u5316\u93b5\u88fd\u4f5c\u7684\uff01\u300d\u4f46\u662f\u4f60\u771f\u7684\u77e5\u9053\u6c2e\u5316\u93b5\u662f\u4ec0\u9ebc\u55ce\uff1f\u6c2e\u5316\u93b5\u6bd4\u8d77\u50b3\u7d71\u534a\u5c0e\u9ad4\u6750\u6599\u300c\u77fd\u300d\u6709\u8457\u5927\u7684\u80fd\u9699\u8207\u66f4\u9ad8\u7684\u96fb\u5b50\u9077\u79fb\u7387\uff0c\u56e0\u6b64\u80fd\u627f\u53d7\u66f4\u9ad8\u7684\u96fb\u58d3\uff0c\u9084\u80fd\u9032\u884c\u9ad8\u983b\u7387\u7684\u5207\u63db\uff0c\u56e0\u6b64\uff0c\u6c2e\u5316\u93b5\u5145\u96fb\u5668\u53ef\u4ee5\u64c1\u6709\u66f4\u9ad8\u901f\u5ea6\u7684\u5145\u96fb\u6548\u7387\uff0c\u9084\u80fd\u8b93\u8a2d\u5099\u66f4\u52a0\u8f15\u4fbf\uff0c\u8b93\u6211\u5011\u4f86\u8a8d\u8b58\u6c2e\u5316\u93b5\u7684\u7269\u7406\u7279\u6027\u4ee5\u53ca\u88fd\u4f5c\u904e\u7a0b\u5427\uff01<\/strong><\/span><\/p>\n

\u64b0\u6587\uff5c\u9ec3\u9f0e\u921e<\/strong><\/p>\n

\u77fd\uff08Si\uff09\uff0c\u88ab\u8b7d\u70ba\u300c\u534a\u5c0e\u9ad4\u4e4b\u6bcd\u300d\uff0c\u56e0\u5176\u8c50\u5bcc\u7684\u542b\u91cf\u3001\u826f\u597d\u7684\u71b1\u7a69\u5b9a\u6027\u4ee5\u53ca\u5929\u7136\u7684\u4e8c\u6c27\u5316\u77fd\u8986\u84cb\u5c64\uff0c\u9577\u671f\u4ee5\u4f86\u5728\u534a\u5c0e\u9ad4\u9818\u57df\u4e2d\u4f54\u64da\u4e3b\u5c0e\u5730\u4f4d\uff08\u66f4\u591a\u95dc\u65bcSi\u7684\u5167\u5bb9\u8acb\u53c3\u8003\u300a\u4e00\u300c\u77fd\u300d\u4e4b\u9593\uff0c\u534a\u5c0e\u9ad4\u4ee3\u8a00\u4eba\u8d70\u4e0b\u795e\u58c7<\/a>\u300b\uff09\u3002\u7136\u800c\uff0c\u96a8\u8457\u79d1\u6280\u7684\u98db\u901f\u767c\u5c55\uff0c\u73fe\u4ee3\u96fb\u5b50\u5143\u4ef6\u5c0d\u65bc\u9ad8\u6548\u80fd\u3001\u9ad8\u983b\u7387\u3001\u5c0f\u9ad4\u7a4d\u7684\u9700\u6c42\u4e0d\u65b7\u589e\u52a0\uff0c\u77fd\u57fa\u5143\u4ef6\u7684\u4fb7\u9650\u6027\u8d8a\u4f86\u8d8a\u96e3\u4ee5\u61c9\u5c0d\u9019\u4e9b\u65b0\u9700\u6c42\uff0c\u6c2e\u5316\u93b5 (GaN) \u4f5c\u70ba\u65b0\u8208\u7684\u534a\u5c0e\u9ad4\u6750\u6599\uff0c\u6b63\u9010\u6f38\u6311\u6230\u77fd\u5728\u9019\u4e00\u9818\u57df\u4e2d\u7684\u5730\u4f4d\uff0c\u5e02\u9762\u4e0a\u6709\u8d8a\u4f86\u8d8a\u591a\u7684\u96fb\u6e90\u4f9b\u61c9\u5668\u4ee5GaN\u70ba\u8ce3\u9ede\uff0c\u90a3\u9ebcGaN\u5230\u5e95\u6709\u54ea\u4e9b\u512a\u52e2\uff0c\u8b93\u5b83\u5099\u53d7\u9752\u775e\u5462\uff1f<\/p>\n

\"\"
\u57161\uff1a\u884c\u52d5\u5145\u96fb\u5668\u793a\u610f\u5716\uff5c\u4f86\u6e90\uff1aDell-E AI model<\/figcaption><\/figure>\n

 <\/p>\n

GaN vs Si\uff1a\u80fd\u9699\u7684\u512a\u52e2<\/strong><\/span><\/h6>\n

GaN\u8207Si\u6700\u5927\u7684\u5340\u5225\u5728\u65bc\u5b83\u5011\u7684\u80fd\u9699\u5927\u5c0f\uff0c\u80fd\u9699\u53ef\u4ee5\u6bd4\u4f5c\u96fb\u5b50\u79fb\u52d5\u7684\u300c\u80fd\u91cf\u9580\u6abb\u300d\uff1a\u96fb\u5b50\u9700\u8981\u5177\u5099\u8db3\u5920\u7684\u80fd\u91cf\u624d\u80fd\u901a\u904e\u9019\u500b\u9580\u6abb\uff0c\u9032\u800c\u5728\u6750\u6599\u4e2d\u5c0e\u96fb\u3002\u77fd\u7684\u80fd\u9699\u70ba1.1\u96fb\u5b50\u4f0f\u7279\uff08eV\uff09\uff0c\u800cGaN\u7684\u80fd\u9699\u9054\u52303.4 eV\uff0c\u5c6c\u65bc\u5bec\u80fd\u9699\u6750\u6599\uff0c\u56e0\u6b64\uff0cGaN\u80fd\u5920\u627f\u53d7\u66f4\u9ad8\u7684\u96fb\u58d3\u800c\u4e0d\u6703\u767c\u751f\u64ca\u7a7f\uff08\u5373\u96fb\u5b50\u5931\u63a7\u5730\u901a\u904e\u6750\u6599\uff09\uff0c\u4e26\u4e14\u80fd\u5920\u5728\u9ad8\u6eab\u74b0\u5883\u4e2d\u7a69\u5b9a\u904b\u884c\uff0c\u6750\u6599\u4e0d\u5bb9\u6613\u56e0\u70ba\u74b0\u5883\u6eab\u5ea6\u8b8a\u9ad8\u800c\u6f0f\u96fb\uff0c\u9019\u4f7fGaN\u9069\u5408\u61c9\u7528\u65bc\u96fb\u58d3\u9ad8\u6216\u5de5\u4f5c\u6eab\u5ea6\u9ad8\u7684\u8a2d\u5099\uff0c\u5982\u96fb\u6e90\u8f49\u63db\u5668\u548c\u96fb\u52d5\u8eca\u5145\u96fb\u5668\uff0c\u6b64\u5916\uff0cGaN\u7684\u96fb\u5b50\u9077\u79fb\u7387\u662f\u77fd\u7684\u4e94\u500d\uff0c\u9019\u8b93GaN\u5143\u4ef6\u80fd\u66f4\u5feb\u901f\u5730\u50b3\u8f38\u96fb\u5b50\u4e26\u9032\u884c\u958b\u95dc\u64cd\u4f5c\uff0c\u5c24\u5176\u9069\u7528\u65bc\u9700\u8981\u9ad8\u983b\u7387\u64cd\u4f5c\u7684\u74b0\u5883\uff0c\u59825G\u901a\u8a0a\u57fa\u7ad9\u3002<\/p>\n

\"\"
\u88681\uff1aSi\u548cGaN\u7684\u7279\u6027\u6bd4\u8f03\uff0c\u53ef\u4ee5\u770b\u5230\u9664\u4e86\u71b1\u5c0e\u7387\u4e4b\u5916\uff0cGaN\u7686\u6709\u8457\u66f4\u512a\u7570\u7684\u5c0e\u96fb\u6027\uff5c\u4f86\u6e90\uff1a\u4fee\u6539\u81ea\u53c3\u8003\u8cc7\u6599[1]<\/figcaption><\/figure>\n
GaN\u5728\u65e5\u5e38\u751f\u6d3b\u4e2d\u7684\u61c9\u7528<\/strong><\/span><\/h6>\n

\u70ba\u4ec0\u9ebcGaN\u7684\u96fb\u6e90\u4f9b\u61c9\u5668\u5982\u6b64\u53d7\u6b61\u8fce\uff1f\u9996\u5148\uff0cGaN\u7684\u5bec\u80fd\u9699\u5141\u8a31\u5176\u627f\u53d7\u66f4\u5927\u7684\u8f38\u5165\u96fb\u58d3\uff0c\u5f9e\u800c\u5be6\u73fe\u66f4\u5feb\u7684\u5145\u96fb\u901f\u5ea6\uff0c\u5c31\u50cf\u4f7f\u7528\u9ad8\u58d3\u6c34\u69cd\u80fd\u66f4\u5feb\u901f\u5730\u586b\u6eff\u6c34\u6876\u4e00\u6a23\uff0cGaN\u53ef\u4ee5\u8fc5\u901f\u5c07\u80fd\u91cf\u50b3\u8f38\u81f3\u8a2d\u5099\uff0c\u5176\u6b21\uff0cGaN\u64c1\u6709\u8f03\u4f4e\u7684\u5c0e\u901a\u96fb\u963b\uff0c\u9019\u610f\u5473\u8457\u7576\u96fb\u6d41\u901a\u904e\u5143\u4ef6\u6642\uff0c\u7522\u751f\u7684\u80fd\u91cf\u640d\u8017\u66f4\u5c11\uff0c\u76f4\u63a5\u63d0\u5347\u4e86\u6574\u9ad4\u5145\u96fb\u6548\u7387\uff0c\u7b2c\u4e09\uff0cGaN\u5177\u6709\u66f4\u5feb\u7684\u958b\u95dc\u901f\u5ea6\uff0c\u53ef\u4ee5\u66f4\u9ad8\u6548\u5730\u5b8c\u6210\u96fb\u529b\u8f49\u63db\uff0c\u6e1b\u5c11\u80fd\u91cf\u6d6a\u8cbb\u4e26\u7e2e\u77ed\u5145\u96fb\u6642\u9593\uff0c\u9019\u4e9b\u7279\u6027\u4f7f\u5f97GaN\u5145\u96fb\u5668\u5728\u63d0\u4f9b\u5f37\u5927\u7684\u529f\u7387\u8f38\u51fa\u7684\u540c\u6642\uff0c\u53c8\u80fd\u4f7f\u5143\u4ef6\u8b8a\u5f97\u66f4\u8f15\u5de7\u5bb9\u6613\u651c\u5e36\uff0c\u540c\u6642GaN\u7684\u9ad8\u6eab\u7a69\u5b9a\u6027\u4e5f\u907f\u514d\u4e86\u5145\u96fb\u5668\u904e\u71b1\u5931\u6548\uff0c\u9032\u4e00\u6b65\u5f37\u5316\u4e86\u7522\u54c1\u7684\u8010\u7528\u6027\uff0c\u9664\u4e86\u884c\u52d5\u5145\u96fb\u5668\uff0cGaN\u6280\u8853\u4fc3\u9032\u4e86\u96fb\u52d5\u6c7d\u8eca\u7684\u767c\u5c55\uff0c\u96fb\u52d5\u8eca\u7684\u96fb\u6e90\u8f49\u63db\u7cfb\u7d71\u8981\u6c42\u9ad8\u6548\u80fd\u548c\u9ad8\u529f\u7387\u5bc6\u5ea6\uff0c\u800cGaN\u6191\u85c9\u5176\u9ad8\u6548\u7684\u529f\u7387\u8f49\u63db\u80fd\u529b\uff0c\u52a0\u4e0a\u5176\u8010\u71b1\u7684\u7279\u6027\uff0c\u6210\u70ba\u8eca\u8f09\u5145\u96fb\u5668\u7684\u7406\u60f3\u9078\u64c7\u3002<\/p>\n

\"\"
\u57162\uff1a\u96fb\u52d5\u6c7d\u8eca\uff5c\u4f86\u6e90\uff1aWikimedia Commons<\/figcaption><\/figure>\n

 <\/p>\n

GaN\u7684\u6311\u6230\u8207\u74f6\u9838<\/strong><\/span><\/h6>\n

\u5118\u7ba1GaN\u5728\u8a31\u591a\u65b9\u9762\u8d85\u8d8a\u4e86\u77fd\uff0c\u4f46\u5b83\u4e5f\u4e26\u975e\u6c92\u6709\u7f3a\u9ede\uff0c\u9996\u5148\uff0c\u96d6\u7136GaN\u5728\u9ad8\u6eab\u4e0b\u5177\u6709\u826f\u597d\u7684\u71b1\u7a69\u5b9a\u6027\uff0c\u4f46\u5176\u71b1\u5c0e\u7387\u537b\u4f4e\u65bc\u77fd\uff0c\u9019\u5728\u9ad8\u983b\u904b\u884c\u6642\u5bb9\u6613\u5c0e\u81f4\u5143\u4ef6\u904e\u71b1\uff0c\u5f71\u97ff\u5176\u6027\u80fd\uff0c\u5176\u6b21\uff0c\u5728\u6676\u9ad4\u751f\u9577\u904e\u7a0b\u4e2d\uff0cGaN\u8f03\u5bb9\u6613\u7522\u751f\u7f3a\u9677\uff0c\u9019\u4e9b\u7f3a\u9677\u6703\u6355\u6349\u5230\u96fb\u5b50\u6216\u96fb\u6d1e\uff0c\u5c31\u50cf\u4eba\u5728\u8d70\u5728\u6ce5\u6fd8\u4e0d\u5e73\u7684\u9053\u8def\u4e0a\u4e00\u6a23\uff0c\u96fb\u5b50\u5728\u904b\u884c\u6642\u53ef\u80fd\u6703\u300c\u6389\u9032\u9677\u9631\u300d\uff0c\u5c0e\u81f4\u5c0e\u96fb\u6027\u4e0b\u964d\uff0c\u9032\u800c\u5f71\u97ff\u5143\u4ef6\u7684\u6548\u7387\uff0c\u9019\u4e5f\u4f7f\u5f97\u88fd\u9020\u9ad8\u54c1\u8cea\u7684GaN\u6750\u6599\u6210\u672c\u8f03\u9ad8\uff0c\u963b\u7919\u4e86\u5176\u5927\u898f\u6a21\u5546\u696d\u5316\u7684\u9032\u7a0b\u3002<\/p>\n

 <\/p>\n

GaN\u5982\u4f55\u88fd\u4f5c\uff1f\u6c2b\u5316\u7269\u6c23\u76f8\u5916\u5ef6\u6cd5\u8207\u6c28\u71b1\u6cd5<\/strong><\/span><\/h6>\n

\u76ee\u524d\u4e3b\u8981\u6709\u5169\u7a2e\u88fd\u7a0b\u6280\u8853\uff1a\u6c2b\u5316\u7269\u6c23\u76f8\u5916\u5ef6\u6cd5\uff08HVPE\uff09\u548c\u6c28\u71b1\u6cd5\uff08Ammonothermal\uff09\uff0cHVPE\u5229\u7528\u6c2b\u6c23\u4f5c\u70ba\u8f09\u6c23\uff0c\u5c07\u6c2f\u5316\u6c2b\uff08HCl\uff09\u8207\u93b5\uff08Ga\uff09\u53cd\u61c9\u751f\u6210\u9ad8\u63ee\u767c\u6027\u7684\u6c2f\u5316\u93b5\uff08GaCl\uff09\uff0c\u7136\u5f8c\u8207\u6c28\uff08NH\u2083\uff09\u53cd\u61c9\uff0c\u751f\u6210GaN\u6676\u9ad4\u3002\u6574\u500b\u904e\u7a0b\u5728\u9ad8\u6eab\uff08\u7d041000\u00b0C\uff09\u4e0b\u9032\u884c\uff0c\u96d6\u7136HVPE\u80fd\u5920\u5feb\u901f\u751f\u9577\u5927\u91cf\u7684GaN\uff0c\u4f46\u5bb9\u6613\u7522\u751f\u88c2\u7e2b\u548c\u6676\u683c\u7f3a\u9677\uff0c\u7121\u6cd5\u751f\u6210\u9ad8\u54c1\u8cea\u7684\u6676\u9ad4\u6750\u6599\uff1b\u6c28\u71b1\u6cd5\u5247\u5229\u7528\u8d85\u81e8\u754c\u6c28\u4f5c\u70ba\u6eb6\u5291\uff0c\u8d85\u81e8\u754c\u6c28\u662f\u4e00\u7a2e\u5728\u9ad8\u58d3\u9ad8\u6eab\u689d\u4ef6\u4e0b\u65e2\u5177\u6709\u6db2\u9ad4\u7684\u6eb6\u89e3\u80fd\u529b\uff0c\u4e5f\u5177\u5099\u6c23\u9ad4\u7684\u64f4\u6563\u6027\uff0c\u900f\u904e\u6c28\u6eb6\u89e3\u93b5\u4e26\u9010\u6b65\u6c89\u7a4dGaN\u6676\u9ad4\uff0c\u6c28\u71b1\u6cd5\u80fd\u5920\u5728\u8f03\u4f4e\u7684\u6eab\u5ea6\u4e0b\u9032\u884c\uff0c\u7bc0\u7701\u80fd\u6e90\u4e26\u964d\u4f4e\u6210\u672c\uff0c\u8207HVPE\u76f8\u6bd4\uff0c\u6c28\u71b1\u6cd5\u751f\u6210\u7684GaN\u7f3a\u9677\u5bc6\u5ea6\u8f03\u4f4e\uff0c\u4f46\u5176\u751f\u9577\u901f\u5ea6\u8f03\u6162\uff0c\u4e14\u5de5\u85dd\u76f8\u5c0d\u8907\u96dc\uff0c\u56e0\u6b64\u66f4\u9069\u5408\u7528\u65bc\u9ad8\u54c1\u8cea\u7684\u61c9\u7528\u9700\u6c42\u3002<\/p>\n

 <\/p>\n

\u7d50\u3000\u8a9e<\/strong><\/span><\/h6>\n

GaN\u4ee5\u5176\u512a\u7570\u7684\u80fd\u9699\u7279\u6027\u548c\u9ad8\u96fb\u5b50\u9077\u79fb\u7387\uff0c\u5728\u9ad8\u6548\u80fd\u96fb\u529b\u8f49\u63db\u61c9\u7528\u4e2d\u5c55\u73fe\u51fa\u5de8\u5927\u7684\u6f5b\u529b\uff0c\u7121\u8ad6\u662f\u5728\u884c\u52d5\u5145\u96fb\u5668\u9084\u662f\u96fb\u52d5\u8eca\u5145\u96fb\u7cfb\u7d71\u4e2d\uff0cGaN\u90fd\u63d0\u4f9b\u4e86\u66f4\u9ad8\u7684\u5145\u96fb\u901f\u5ea6\u3001\u66f4\u5c0f\u7684\u9ad4\u7a4d\u4ee5\u53ca\u66f4\u5f37\u7684\u8010\u7528\u6027\uff0c\u96a8\u8457\u6280\u8853\u7684\u9032\u6b65\uff0cGaN\u7684\u88fd\u9020\u5de5\u85dd\u5c07\u6703\u9010\u6f38\u6210\u719f\uff0c\u6210\u672c\u4e5f\u5c07\u9032\u4e00\u6b65\u4e0b\u964d\uff0c\u9019\u5c07\u63a8\u52d5GaN\u5728\u66f4\u591a\u96fb\u5b50\u7522\u54c1\u4e2d\u7684\u61c9\u7528\u3002<\/p>\n

 <\/p>\n

\n

\u53c3\u8003\u6587\u737b<\/strong><\/p>\n

    \n
  1. Flack, T. J., Pushpakaran, B. N., & Bayne, S. B. (2016). GaN technology for power electronic applications: A review. Journal of Electronic Materials, 45, 2673-2682.<\/li>\n
  2. Buffolo, M., Favero, D., Marcuzzi, A., De Santi, C., Meneghesso, G., Zanoni, E., & Meneghini, M. (2024). Review and outlook on GaN and SiC power devices: industrial state-of-the-art, applications, and perspectives. IEEE Transactions on Electron Devices.<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"

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