{"id":33519,"date":"2019-01-25T00:50:32","date_gmt":"2019-01-24T16:50:32","guid":{"rendered":"https:\/\/case.ntu.edu.tw\/blog\/?p=33519"},"modified":"2019-01-17T14:58:23","modified_gmt":"2019-01-17T06:58:23","slug":"%e6%96%b0%e4%b8%80%e4%bb%a3%e8%a3%bd%e7%a8%8b%e7%9a%84%e9%97%9c%e9%8d%b5%ef%bc%9a13-5%e5%a5%88%e7%b1%b3%e7%9a%84%e3%80%8c%e6%a5%b5%e7%ab%af%e3%80%8d%e7%b4%ab%e5%a4%96%e5%85%89","status":"publish","type":"post","link":"https:\/\/case.ntu.edu.tw\/blog\/?p=33519","title":{"rendered":"\u65b0\u4e00\u4ee3\u88fd\u7a0b\u7684\u95dc\u9375\uff1a13.5\u5948\u7c73\u7684\u300c\u6975\u7aef\u300d\u7d2b\u5916\u5149"},"content":{"rendered":"

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\"\"
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\u64b0\u6587\uff5c\u9673\u5955\u5ef7<\/strong><\/p>\n

\u25cf\u7269\u7406\u6975\u9650 <\/strong><\/span><\/p>\n

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\"\"
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\u25cf\u6975\u7aef\u7d2b\u5916\u5149\u5149\u6e90\uff1a\u932b\u96fb\u6f3f<\/strong><\/span><\/p>\n

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\"\"
\u5716\u4e8c\u3001EUV\u5149\u6e90\u7684\u7522\u751f\u3002<\/figcaption><\/figure>\n

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 <\/p>\n

\u53c3\u8003\u8cc7\u6599\uff1a<\/strong>Faiz Rahman, EUV Light Sources for Next-Gen Lithography, Optics & Photonics News (2018)<\/p>\n","protected":false},"excerpt":{"rendered":"

\u25a0\u5f9e1990\u5e74\u4ee3\u81f3\u4eca\uff0c\u534a\u5c0e\u9ad4\u754c\u6301\u7e8c\u4f7f\u7528\u6ce2\u9577\u70ba248\u5948\u7c73\u548c193\u5948\u7c73\u7684\u5149\u6e90\u88fd\u9020\u96fb\u5b50\u5143\u4ef6\u3002\u9019\u6bb5\u671f\u9593\u79d1\u5b78\u5bb6\u548c\u5de5\u7a0b\u5e2b\u4e0d\u65b7\u6311\u6230\u7269\u7406\u6975\u9650\uff0c\u4f7f\u7528\u76f8\u540c\u7684\u6ce2\u9577\u88fd\u9020\u51fa\u66f4\u7cbe\u7d30\u7684\u5143\u4ef6\uff0c\u81f3\u4eca\u5df2\u7d93\u8d85\u904e\u4e8c\u5341\u5e74\u3002\u7136\u800c\uff0c\u534a\u5c0e\u9ad4\u5f9e1997\u5e74\u7684250\u5948\u7c73\u7bc0\u9ede\u52302018\u5e74\u76847\u5948\u7c73\u7bc0\u9ede\uff0c\u5f88\u96e3\u518d\u7e7c\u7e8c\u5fae\u7e2e\u4e86\u3002\u70ba\u4e86\u88fd\u4f5c\u66f4\u5c0f\u66f4\u5feb\u7684\u96fb\u5b50\u5143\u4ef6\uff0c\u534a\u5c0e\u9ad4\u88fd\u7a0b\u9700\u8981\u6ce2\u9577\u8d8a\u77ed\u7684\u5149\u7dda\u3002\u4e0b\u4e00\u500b\u4e16\u4ee3\u7684\u534a\u5c0e\u9ad4\u5c07\u6703\u4f7f\u7528\u5168\u65b0\u7684\u5149\u6e90\uff1a\u6ce2\u9577\u70ba13.5\u5948\u7c73\u7684\u6975\u7aef\u7d2b\u5916\u5149\u3002<\/p>\n","protected":false},"author":20,"featured_media":33525,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[1023,3293,39],"tags":[1045,200,3192],"aioseo_notices":[],"jetpack_featured_media_url":"https:\/\/case.ntu.edu.tw\/blog\/wp-content\/uploads\/2019\/01\/front.jpg","_links":{"self":[{"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=\/wp\/v2\/posts\/33519"}],"collection":[{"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=\/wp\/v2\/users\/20"}],"replies":[{"embeddable":true,"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=33519"}],"version-history":[{"count":1,"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=\/wp\/v2\/posts\/33519\/revisions"}],"predecessor-version":[{"id":33526,"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=\/wp\/v2\/posts\/33519\/revisions\/33526"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=\/wp\/v2\/media\/33525"}],"wp:attachment":[{"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=33519"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=33519"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/case.ntu.edu.tw\/blog\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=33519"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}