{"id":28125,"date":"2017-06-06T00:54:21","date_gmt":"2017-06-05T16:54:21","guid":{"rendered":"https:\/\/case.ntu.edu.tw\/blog\/?p=28125"},"modified":"2018-07-29T09:51:12","modified_gmt":"2018-07-29T01:51:12","slug":"%e6%ac%a110%e5%a5%88%e7%b1%b3%e4%b8%96%e4%bb%a3%e7%9a%84%e5%8d%8a%e5%b0%8e%e9%ab%94%e6%80%8e%e9%ba%bc%e5%81%9a%ef%bc%9f","status":"publish","type":"post","link":"https:\/\/case.ntu.edu.tw\/blog\/?p=28125","title":{"rendered":"\u6b2110\u5948\u7c73\u4e16\u4ee3\u7684\u534a\u5c0e\u9ad4\u600e\u9ebc\u505a\uff1f"},"content":{"rendered":"

\u25a0\u5728\u76f8\u540c\u7684\u5340\u57df\u653e\u5165\u8d8a\u591a\u7684\u96fb\u5b50\u5143\u4ef6\uff0c\u4ee3\u8868\u540c\u4e00\u652f\u624b\u6a5f\u6216\u96fb\u8166\u88dd\u7f6e\u80fd\u63d0\u4f9b\u66f4\u5f37\u66f4\u5feb\u901f\u7684\u670d\u52d9\uff0c\u56e0\u6b64\u7e2e\u5c0f\u8655\u7406\u5668\u4e2d\u96fb\u5b50\u5143\u4ef6\u7684\u5c3a\u5bf8\u662f\u6240\u6709\u534a\u5c0e\u9ad4\u5927\u5ee0\u5171\u540c\u7684\u76ee\u6a19\u3002\u80fd\u4f9d\u7167\u570b\u969b\u534a\u5c0e\u9ad4\u6280\u8853\u85cd\u5716(ITRS)\u63d0\u5347\u88fd\u9020\u80fd\u529b\u7684\u516c\u53f8\u5c07\u80fd\u7368\u4f54\u5e02\u5834\uff0c\u5c31\u50cf\u53f0\u7a4d\u96fb\u6392\u9664\u4e09\u661f\u516c\u53f8\uff0c\u5c07\u57282017\u548c2018\u5e74\u9023\u7e8c\u7368\u4f54\u860b\u679ciPhone\u624b\u6a5f\u8655\u7406\u5668\u3002\u82e5\u8981\u5728\u672a\u4f86\u7684\u534a\u5c0e\u9ad4\u7bc0\u9ede\u6301\u7e8c\u4fdd\u6301\u9818\u5148\uff0c\u79d1\u6280\u5fc5\u9808\u8207\u6642\u4ff1\u9032\u3002\u5728\u9019\u500b10\u5948\u7c73\u7bc0\u9ede\u4ee5\u4e0b\u7684\u4e16\u4ee3\uff0c\u5404\u5bb6\u88fd\u9020\u5546\u6b63\u7a4d\u6975\u5c0b\u6c42\u589e\u52a0\u55ae\u4f4d\u9762\u7a4d\u4e0a\u96fb\u8def\u6548\u80fd\u7684\u65b9\u6cd5\u3002<\/strong><\/span><\/p>\n

\"\"
\u77fd\u6676\u5713\u4e0a\u7684\u7a4d\u9ad4\u96fb\u8def<\/figcaption><\/figure>\n

\u64b0\u6587\uff5c<\/strong>\u9673\u5955\u5ef7<\/p>\n

\u5e7e\u4e4e\u81ea\u5f9e\u96fb\u6676\u9ad4\u88ab\u767c\u660e\u4ee5\u4f86\uff0c\u4eba\u5011\u5373\u958b\u59cb\u4f7f\u7528\u300c\u66dd\u5149-\u8755\u523b\u300d\u7684\u65b9\u5f0f\u88fd\u4f5c\u534a\u5c0e\u9ad4\u5143\u4ef6\uff1a\u5982\u5716\u4e00\u6240\u793a\uff0c\u57fa\u677f\u4e0a\u6709\u5f85\u8755\u523b\u7684\u534a\u5c0e\u9ad4\u6750\u6599(\u5716\u4e00\u5de6\uff0c\u9ec3\u8272)\u3002\u5de5\u7a0b\u5e2b\u5c07\u60f3\u8981\u88fd\u4f5c\u7684\u96fb\u8def\u5716\u6848\u756b\u5728\u5149\u7f69\u4e0a\uff0c\u4e26\u8b93\u6750\u6599\u66dd\u66ec\u5149\u7dda(\u5716\u4e00\u4e2d)\u3002\u6c92\u6709\u66dd\u5149\u7684\u5340\u57df\u975e\u5e38\u5bb9\u6613\u88ab\u8755\u523b\uff0c\u800c\u63a5\u53d7\u66dd\u5149\u7684\u5340\u57df\u8b8a\u5f97\u5c79\u7acb\u4e0d\u6416\uff0c\u7d93\u904e\u8755\u523b\u4e4b\u5f8c\u80fd\u7559\u4e0b\u4f86\u3002\u5982\u6b64\u4e00\u4f86\uff0c\u5de5\u7a0b\u5e2b\u5c07\u539f\u672c\u5728\u5149\u7f69\u4e0a\u9762\u7684\u96fb\u8def\u5716\u5f62\u8f49\u79fb\u5230\u534a\u5c0e\u9ad4\u4e0a\u9762(\u5716\u4e00\u53f3\uff0c\u7d05\u8272)\u3002<\/p>\n

\u55ae\u4e00\u96fb\u6676\u9ad4\u7684\u534a\u5c0e\u9ad4\u7269\u7406\u7279\u6027<\/a>\u5c0d\u65bc\u7e2e\u5c0f\u5c3a\u5bf8\u4e5f\u5f88\u91cd\u8981\uff0c\u4f46\u672c\u6587\u4e3b\u8981\u91dd\u5c0d\u66dd\u5149\u8755\u523b\u79d1\u6280\uff0c\u4ecb\u7d39\u4e00\u4e9b\u572810\u5948\u7c73\u4ee5\u4e0b\u534a\u5c0e\u9ad4\u7bc0\u9ede\u7684\u91cd\u8981\u6216\u6f5b\u5728\u6280\u8853\u3002<\/p>\n

\"\"
\u5716\u4e00\u3001\u66dd\u5149\u8755\u523b\u904e\u7a0b\u793a\u610f\u5716\u3002<\/figcaption><\/figure>\n

\u25cf\u6d78\u6f64\u5f0f\u8755\u523b (immersion lithography)<\/strong><\/span><\/p>\n

\u6211\u5011\u50c5\u50c5\u9700\u8981\u5c07\u5149\u7f69\u7684\u5716\u6848\u8d8a\u756b\u8d8a\u5c0f\uff0c\u5c31\u80fd\u8755\u523b\u51fa\u8d8a\u4f86\u8d8a\u5c0f\u7684\u96fb\u8def\u3002\u4f46\u662f\u7576\u5149\u7f69\u7684\u5c3a\u5bf8\u548c\u5149\u6e90\u7684\u6ce2\u9577\u5dee\u4e0d\u591a\u5c0f\u7684\u6642\u5019\uff0c\u7e5e\u5c04\u6548\u61c9\u8b8a\u5f97\u76f8\u7576\u56b4\u91cd\uff0c\u66dd\u5149\u51fa\u4f86\u7684\u96fb\u8def\u548c\u5149\u7f69\u4e0a\u5716\u6848\u76f8\u5dee\u975e\u5e38\u5927\u3002\u8981\u89e3\u6c7a\u9019\u500b\u554f\u984c\uff0c\u4f7f\u7528\u66f4\u5c0f\u7684\u6ce2\u9577\u5c31\u597d\u4e86\u3002\u5f9e\u539f\u672c\u7684\u7da0\u5149\u986f\u5f71\uff0c\u6ce2\u9577\u4e00\u8def\u964d\u5c07\u4f4e\u5230\u85cd\u5149\u3001\u751a\u81f3\u7d2b\u5916\u5149\u3002\u7136\u800c\uff0c\u6ce2\u9577\u8d8a\u77ed\u7684\u5149\u6210\u672c\u8d8a\u9ad8\uff0c\u800c\u4e14\u7d2b\u5916\u5149\u5177\u6709\u9ad8\u80fd\u91cf\uff0c\u5f88\u5bb9\u6613\u5c07\u8a31\u591a\u5143\u4ef6\u76f4\u63a5\u6253\u58de\uff0c\u534a\u5c0e\u9ad4\u88fd\u7a0b\u66fe\u7d93\u56e0\u6b64\u5361\u4f4f\u7121\u6cd5\u7e7c\u7e8c\u5fae\u7e2e\u3002\u6642\u4efb\u53f0\u7a4d\u96fb\u7814\u767c\u526f\u7e3d\u7684\u6797\u672c\u5805\u535a\u58eb\u767c\u660e\u4e86\u6d78\u6f64\u5f0f\u8755\u523b\uff0c\u4e00\u8209\u6253\u7834\u4e86\u6ce2\u9577\u7684\u9650\u5236\u3002\u5149\u5728\u6db2\u9ad4\u4e2d\u8dd1\u5f97\u6162\uff0c\u6ce2\u9577\u4e5f\u77ed\u3002\u5229\u7528\u9019\u500b\u539f\u7406\uff0c\u628a\u6676\u5713\u6ce1\u5728\u6db2\u9ad4\u4e2d\u5c31\u5728\u76f8\u540c\u7684\u5149\u6e90\u4e0b\uff0c\u4f7f\u6676\u5713\u770b\u7684\u7b49\u6548\u6ce2\u9577\u8b8a\u5c0f\uff0c\u88fd\u4f5c\u51fa\u66f4\u5c0f\u7684\u7d50\u69cb\u3002\u81ea\u5f9e65\u5948\u7c73\u7bc0\u9ede\uff0c\u6d78\u6f64\u5f0f\u8755\u523b\u88ab\u5ee3\u6cdb\u4f7f\u7528\u5728\u88fd\u7a0b\u4e4b\u4e2d\u3002<\/p>\n

\u25cf\u591a\u91cd\u66dd\u5149(multiple patterning)<\/strong><\/span><\/p>\n

\u9664\u4e86\u4e0a\u8ff0\u7684\u6d78\u6f64\u5f0f\u8755\u523b\u6280\u8853\uff0c\u9762\u5c0d\u7576\u4eca10\u5948\u7c73\u4ee5\u4e0b\u7684\u7bc0\u9ede\uff0c\u534a\u5c0e\u9ad4\u88fd\u7a0b\u6709\u5169\u5927\u91cd\u9ede\uff1a\u591a\u91cd\u66dd\u5149\u548c\u6975\u7aef\u7d2b\u5916\u5149(EUV)\uff0c\u5169\u8005\u7684\u6982\u5ff5\u90fd\u76f8\u7576\u76f4\u89c0\u3002\u5982\u5716\u4e8c\u6240\u793a\uff0c\u539f\u672c\u88fd\u7a0b\u6975\u9650\u70ba120\u5948\u7c73(\u5373\u5169\u500b\u76f8\u540c\u7684\u5143\u4ef6\u6700\u8fd1\u8ddd\u96e2\u70ba120\u5948\u7c73)\u3002\u82e5\u4f7f\u7528\u76f8\u540c\u7684\u5149\u7f69\u548c\u5149\u6e90\u91cd\u8907\u66dd\u5149\u8755\u523b\u4e09\u6b21(\u4e09\u91cd\u66dd\u5149triple patterning)\uff0c\u4f46\u6bcf\u6b21\u90fd\u79fb\u52d5\u4e00\u9ede\u4f4d\u7f6e\uff0c\u5c31\u80fd\u88fd\u4f5c\u51fa40\u5948\u7c73\u7684\u7d50\u69cb\uff0c\u70ba\u539f\u672c\u6975\u9650\u7684\u4e09\u5206\u4e4b\u4e00\uff01\u4e0d\u540c\u7684\u88fd\u7a0b\u6709\u4e0d\u540c\u7684\u66dd\u5149\u6b21\u6578\uff0c\u800c\u9019\u6a23\u7684\u65b9\u6cd5\u88ab\u901a\u7a31\u70ba\u300c\u591a\u91cd\u66dd\u5149\u300d\u3002<\/p>\n

\"\"
\u5716\u4e8c\u3001\u591a\u91cd\u66dd\u5149\u793a\u610f\u5716\u3002<\/figcaption><\/figure>\n

\u25cf\u6975\u7aef\u7d2b\u5916\u5149(Extreme Ultraviolet, EUV)<\/strong><\/span><\/p>\n

\u53e6\u4e00\u500b\u91cd\u9ede\u5247\u662f\u91cd\u65b0\u56de\u5230\u6b77\u53f2\u8f2a\u8ff4\uff0c\u4f7f\u7528\u66f4\u5c0f\u6ce2\u9577\u7684\u5149\u2500\u2500\u6975\u7aef\u7d2b\u5916\u5149\u3002\u6ce2\u9577193\u5948\u7c73\u7684\u7d2b\u5916\u5149\u5728\u66dd\u5149\u8755\u523b\u6280\u8853\u4e2d\u5df2\u7d93\u884c\u4e4b\u6709\u5e74\uff0c\u73fe\u5728\u6b63\u662f\u5f80\u66f4\u4f4e\u7684\u6ce2\u9577\u8d70\u4e0b\u53bb\u7684\u6642\u5019\u4e86\u3002\u4e0d\u540c\u65bc193\u5948\u7c73\u7684\u300c\u6b63\u5e38\u300d\u7d2b\u5916\u5149\uff0c\u534a\u5c0e\u9ad4\u8a2d\u5099\u5546\u76ee\u6a19\u5229\u7528\u6ce2\u9577\u6975\u77ed\u7684\u300c\u6975\u7aef\u7d2b\u5916\u5149\u300d\uff0c\u50c5\u6709\u6578\u5341\u5948\u7c73\u3002\u82e5\u958b\u767c\u6210\u529f\uff0c\u9019\u7a2e\u5149\u6e90\u642d\u914d\u6d78\u6f64\u5f0f\u8755\u523b\u548c\u591a\u91cd\u66dd\u5149\u7b49\u6280\u8853\uff0c\u534a\u5c0e\u9ad4\u80fd\u8f15\u6613\u8d70\u904e\u6b21\u5341\u5948\u7c73\u3001\u751a\u81f3\u6b21\u5948\u7c73\u534a\u5c0e\u9ad4\u7bc0\u9ede\u3002<\/p>\n

\"\"
\u5716\u4e09\u3001\u5728\u534a\u5c0e\u9ad4\u88fd\u9020\u7684\u6b77\u53f2\u4e2d\uff0c\u5927\u91cf\u751f\u7522\u7684\u7528\u7684\u66dd\u5149\u5149\u6e90\u5176\u5be6\u7a2e\u985e\u4e0d\u591a\u3002\u73fe\u4eca\u7684193\u5948\u7c73\u7d2b\u5916\u5149\u5df2\u7d93\u4f7f\u7528\u8d85\u904e\u5341\u5e74\u4e86\u3002\u4e0b\u4e00\u4e16\u4ee3\u7684\u5149\u6e90\u6ce2\u9577\u5c07\u53ea\u6709\u6578\u5341\u5948\u7c73\uff0c\u6bd4\u539f\u4f86\u5c0f\u7d04\u5341\u500d[\u53c31]\u3002<\/figcaption><\/figure>\u25cf\u81ea\u7d44\u88dd(self-assembly)<\/strong>\u7d50\u69cb<\/strong><\/span><\/p>\n

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\"\"
\u5716\u56db\u3001\u81ea\u7d44\u88dd\u7d50\u69cb\u793a\u610f\u5716\u3002[\u53c32]<\/figcaption><\/figure>\n

[\u8a3b] \u805a\u5408\u7269\u5305\u542b(2-vinylpyridine)-b-polystyrene-b-poly(2-vinylpyridine)\uff0c\u7c21\u7a31VSV \uff1bpoly(divinylbenzene)\uff0c\u7c21\u7a31p(DVB)\u3002
\n[\u53c31] S. Borkar, \u201cDesign challenges for gigascale integration,\u201d presented at the 37th IEEE\/ACM Int. Symp. Microarchitecture, Portland, OR, 2004.
\n[\u53c32] Hyo Seon Suh, Sub-10-nm patterning via directed self-assembly of block copolymer films with a vapour-phase deposited topcoat, Nature Nanotechnology<\/em> (2017)
\n[\u53c33] Barry Pangrl,\u00a0 A Node By Any Other Name, Semiconductor Engineering <\/em>(2014)<\/p>\n

--<\/span>
\n\u4f5c\u8005\uff1a\u9673\u5955\u5ef7\uff0c\u53f0\u5927\u7269\u7406\u7cfb\u5b78\u58eb\uff0c\u53f2\u4e39\u4f5b\u5927\u5b78\u61c9\u7528\u7269\u7406\u7cfb\u535a\u58eb\u73ed\u5c31\u8b80\u4e2d\u3002\u5c0d\u5404\u9818\u57df\u7684\u79d1\u5b78\u90fd\u975e\u5e38\u597d\u5947\uff0c\u6b61\u8fce\u4e92\u76f8\u4ea4\u6d41\u3002<\/strong><\/span><\/p>\n

 <\/p>\n

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