{"id":23024,"date":"2015-12-22T00:44:58","date_gmt":"2015-12-21T16:44:58","guid":{"rendered":"https:\/\/case.ntu.edu.tw\/blog\/?p=23024"},"modified":"2018-08-01T16:37:50","modified_gmt":"2018-08-01T08:37:50","slug":"%e3%80%90%e7%a9%8d%e9%ab%94%e5%85%89%e8%b7%af%e7%b3%bb%e5%88%97%e4%b9%9d%e3%80%91%e6%99%b6%e5%9c%93%e6%8e%a5%e5%90%88","status":"publish","type":"post","link":"https:\/\/case.ntu.edu.tw\/blog\/?p=23024","title":{"rendered":"\u3010\u7a4d\u9ad4\u5149\u8def\u7cfb\u5217\u4e5d\u3011\u6676\u5713\u63a5\u5408"},"content":{"rendered":"

\u25a0\u5728\u7cfb\u5217\u4e00<\/a>\u6211\u5011\u66fe\u63d0\u53ca\u5149\u6e90\u7684\u91cd\u8981\u6027\uff0c\u9019\u6b21\u6211\u5011\u4f86\u8ac7\u8ac7\u53e6\u4e00\u7a2e\u767c\u5149\u6750\u6599\u8207\u77fd\u6676\u5713\u7684\u6574\u5408\uff1a\u4e09\u4e94\u65cf\u5316\u5408\u7269\u3002<\/strong><\/span><\/p>\n

\"\u5716\u7247\u4f86\u6e90\uff1aLamponi,<\/a>
\u9ede\u958b\u53ef\u770b\u5927\u5716<\/figcaption><\/figure>\n

\u64b0\u6587\uff5c<\/strong>\u65b9\u7a0b\u6bc5<\/p>\n

\u5149\u5b78\u6676\u7247\uff0c\u5149\u6e90\u54c1\u8cea\u53ca\u767c\u5149\u6548\u7387\u6c7a\u5b9a\u4e86\u6676\u7247\u7684\u6210\u6557\uff0c\u7a4d\u9ad4\u5149\u8def\u4e3b\u8981\u5efa\u69cb\u5728\u77fd\u6676\u5713\u4e0a\uff0c\u5149\u6e90\u9808\u70ba\u96f7\u5c04\u5149\uff0c\u4f46\u77fd\u537b\u4e0d\u662f\u500b\u9069\u5408\u4f5c\u96f7\u5c04\u5149\u6e90\u7684\u6750\u6599\uff0c\u4e5f\u56e0\u6b64\u5fc5\u9808\u501f\u52a9\u5176\u4ed6\u6750\u6599\u5e6b\u5fd9\uff0c\u8b93\u80fd\u767c\u5149\u7684\u6750\u6599\u767c\u5149\u5f8c\u518d\u9001\u9032\u77fd\u5149\u6ce2\u5c0e\u88e1\u3002\u88fd\u4f5c\u96f7\u5c04\u672c\u8eab\u4e26\u4e0d\u56f0\u96e3\uff0c\u56f0\u96e3\u9ede\u5728\u65bc\u628a\u96f7\u5c04\u5149\u9001\u9032\u77fd\u6676\u7247\u88e1\u3002\u82e5\u53ea\u662f\u55ae\u55ae\u628a\u96f7\u5c04\u5149\u805a\u7126\u5c04\u5165\u77fd\u6676\u7247\u6703\u6709\u5f88\u591a\u4e0d\u5fc5\u8981\u7684\u640d\u8017\uff0c\u6a21\u614b(mode)\u8ddf\u76f8\u4f4d(phase)\u4e5f\u96e3\u4ee5\u63a7\u5236\uff0c\u56e0\u6b64\u6700\u7406\u60f3\u7684\u72c0\u614b\u662f\u80fd\u76f4\u63a5\u628a\u96f7\u5c04\u6574\u5408\u5230\u6676\u7247\u4e0a\uff0c\u7cfb\u5217\u4e00<\/a>\u63d0\u53ca\u5229\u7528\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d\u540c\u70ba\u56db\u65cf\u5143\u7d20\u7684\u937a(Ge)\u5728\u77fd\u6676\u7247\u4e0a\uff0c\u4ee5\u7c21\u5316\u88fd\u7a0b\uff0c\u672c\u6587\u6211\u5011\u8981\u4f86\u8ac7\u8ac7\u53e6\u4e00\u7a2e\u767c\u5149\u6750\u6599\u8207\u77fd\u6676\u5713\u7684\u6574\u5408\uff0c\u4e09\u4e94\u65cf\u5316\u5408\u7269\u3002<\/p>\n

\u7a4d\u9ad4\u5149\u8def\u76ee\u524d\u6700\u4e3b\u8981\u91dd\u5c0d\u7684\u6ce2\u9577\u70ba1550nm(\u8acb\u898b\u7cfb\u5217\u56db \u6ce2\u9577\u7684\u9078\u64c7<\/a>)\uff0c\u9019\u500b\u6ce2\u6bb5\u767c\u5149\u6548\u7387\u6700\u597d\u7684\u96f7\u5c04\u6750\u6599\u662f\u4e09\u4e94\u65cf\u5316\u5408\u7269\uff0c\u4e3b\u8981\u5305\u62ec AlGaAs, InGaAs, InGaAsP\u7b49\u7b49\uff0c\u4f46\u8ddf\u937a\u4e0d\u540c\uff0c\u4e09\u4e94\u65cf\u5316\u5408\u6676\u683c\u5e38\u6578(\u539f\u5b50\u9593\u8ddd)\u53ca\u6676\u9ad4\u7d50\u69cb\u8207\u77fd\u5dee\u8ddd\u592a\u5927\uff0c\u8981\u5728\u77fd\u6676\u5713\u4e0a\u6210\u9577\u9ad8\u54c1\u8cea\u7684\u4e09\u4e94\u65cf\u6750\u6599\u76f8\u7576\u56f0\u96e3\uff0c\u5fc5\u9808\u4f7f\u7528\u5206\u5b50\u675f\u78ca\u6676\uff0c\u662f\u6210\u672c\u5f88\u9ad8\u7684\u88fd\u7a0b\u3002\u65e2\u7136\u9577\u6676\u3001\u934d\u819c\u7b49\u6280\u8853\u96e3\u4ee5\u9054\u6210\uff0c\u4e0d\u5982\u7528\u6700\u76f4\u89ba\u7684\u60f3\u6cd5\uff1a\u628a\u77fd\u8ddf\u4e09\u4e94\u65cf\u5316\u5408\u7269\u76f4\u63a5\u9ecf\u5728\u4e00\u8d77\uff1f<\/p>\n

\u9019\u4fbf\u662f\u672c\u6587\u4e3b\u984c\uff1a\u6676\u5713\u63a5\u5408(wafer bonding)\u3002\u6676\u5713\u63a5\u5408\u5c31\u5b57\u9762\u4e0a\u89e3\u91cb\u5373\u662f\u628a\u5169\u7247\u6676\u5713\u786c\u751f\u751f\u63a5\u8d77\u4f86\uff0c\u4ee5\u7a4d\u9ad4\u5149\u8def\u6240\u9700\uff0c\u5fc5\u9808\u6709\u4e00\u7247\u77fd\u6676\u7247\uff0c\u53e6\u5916\u4e00\u7247\u4e09\u4e94\u65cf\u5316\u5408\u7269\u7684\u96f7\u5c04\u6676\u7247\uff0c\u7136\u5f8c\u7528\u67d0\u7a2e\u795e\u5947\u7684\u65b9\u5f0f\u8b93\u5169\u7247\u7dca\u7dca\u9ecf\u5728\u4e00\u8d77\u3002\u5728\u89e3\u91cb\u9019\u4e9b\u795e\u5947\u7684\u65b9\u6cd5\u524d\uff0c\u6211\u5011\u8981\u5148\u77e5\u9053\u6676\u5713\u63a5\u5408\u6709\u4ec0\u9ebc\u9650\u5236\uff0c\u5982\u5716\u6240\u793a(\u6b64\u70ba\u6bd4\u5229\u6642\u7814\u7a76\u6a5f\u69cbIMEC\u6240\u505a)\uff0c\u7da0\u8272\u8ddf\u6a58\u7d05\u8272\u70ba\u4e09\u4e94\u65cf\u96f7\u5c04(\u6a58\u7d05\u8272\u662f\u5c08\u9580\u767c\u5149\u7684gain material)\uff0c\u9ec3\u8272\u70ba\u77fd\u5149\u6ce2\u5c0e\uff0c\u593e\u5728\u4e2d\u9593\u900f\u660e\u504f\u85cd\u7684\u5373\u70ba\u9ecf\u8457\u5c64(bonding layer)\u3002\u96f7\u5c04\u5149\u5f9e\u6a58\u7d05\u8272\u4e09\u4e94\u65cf\u88fd\u9020\u51fa\u5f8c\u5fc5\u9808\u88ab\u8026\u5408(couple)\u9032\u9ec3\u8272\u7684\u77fd\u5149\u6ce2\u5c0e(\u5716\u4e2d\u90a3\u4e9b\u6954\u5f62\u7d50\u69cb\u4e5f\u90fd\u662f\u70ba\u4e86\u5e6b\u52a9\u8026\u5408)\uff0c\u56e0\u6b64\u70ba\u4e86\u8b93\u5149\u80fd\u5920\u9806\u5229\u5f9e\u96f7\u5c04\u6750\u6599\u9032\u5165\u77fd\u5149\u6ce2\u5c0e\uff0c\u5169\u7247\u6676\u7247\u7684\u5782\u76f4\u8ddd\u96e2\u8981\u8d8a\u5c0f\u8d8a\u597d\uff0c\u4e5f\u5c31\u662f\u8aaa\u4e2d\u9593\u9ecf\u8457\u5c64\u4e0d\u80fd\u592a\u539a\uff0c\u5426\u5247\u96f7\u5c04\u5149\u6839\u672c\u9032\u4e0d\u53bb\u77fd\u88e1\u9762\uff0c\u4e00\u822c\u4f86\u8aaa\u5fc5\u9808\u5c0f\u65bc\u6578\u767e\u5948\u7c73\uff1b\u518d\u8005\uff0c\u9ecf\u8457\u5c64\u4e0d\u80fd\u5438\u6536\u96f7\u5c04\u5149\uff0c\u82e5\u662f\u5149\u5f9e\u96f7\u5c04\u6676\u7247\u9032\u5165\u5230\u77fd\u7684\u904e\u7a0b\u4e2d\u5fc5\u9808\u7d93\u904e\u5438\u6536\u7684\u9ecf\u8457\u5c64\uff0c\u8026\u5408\u7684\u6548\u7387\u5c07\u6703\u5f88\u5dee\uff0c\u4e5f\u5931\u53bb\u6676\u5713\u63a5\u5408\u7684\u610f\u7fa9\u4e86\u3002<\/p>\n

\u76ee\u524d\u7814\u7a76\u6700\u4e3b\u8981\u7684\u9ecf\u8457\u5c64\u70baDVS-BCB(divinylsiloxane- bis-benzocyclobutene)\u9019\u500b\u9ad8\u5206\u5b50\u3002DVS-BCB\u539a\u5ea6\u5927\u7d04\u5728\u6578\u5341\u5230\u6578\u767e\u5948\u7c73\uff0c\u88fd\u7a0b\u8f03\u5bb9\u6613\uff0c\u80fd\u5728\u5ba4\u6eab\u4e0b\u5b8c\u6210\uff0c\u800c\u4e14\u4e0d\u6703\u5438\u6536\u96f7\u5c04\u5149\u3002\u4f46\u70ba\u4e86\u5c07\u5169\u7247\u63a5\u5408\uff0c\u5fc5\u9808\u5728\u4e09\u4e94\u65cf\u96f7\u5c04\u8ddf\u77fd\u4e2d\u9593\u593e\u4e86\u9019\u9ebc\u4e00\u5c64\u6771\u897f\uff0c\u53ef\u5225\u5c0f\u770b\u9019\u8584\u8584\u4e00\u5c64\uff0c\u96f7\u5c04\u5149\u80fd\u5426\u6210\u529f\u5f9e\u4e09\u4e94\u65cf\u8026\u5408\u5230\u77fd\u88e1\u9762\u95dc\u9375\u5c31\u662f\u90a3\u5e7e\u5341\u5230\u5e7e\u767e\u5948\u7c73\u3002\u65bc\u662f\u4e5f\u6709\u7814\u7a76\u4e7e\u8106\u628a\u9ecf\u8457\u5c64\u53bb\u6389\uff0c\u76f4\u63a5\u5229\u7528\u96fb\u6f3f\u50ac\u5316\u6676\u7247\u8868\u9762\u518d\u76f4\u63a5\u63a5\u5408\u3002\u5169\u7a2e\u65b9\u6cd5\u5404\u6709\u512a\u7f3a\u9ede\uff0c\u4f7f\u7528\u9ecf\u8457\u5c64\u88fd\u7a0b\u5bb9\u6613\uff0c\u8026\u5408\u6548\u7387\u5dee\uff1b\u76f4\u63a5\u63a5\u5408\u9808\u9ad8\u6eab\u88fd\u7a0b\u4f46\u8026\u5408\u6548\u7387\u8f03\u4f73\u3002<\/p>\n

\u4ee5\u4f7f\u7528\u9ecf\u8457\u5c64DVS-BCB\u4f86\u8aaa\uff0c\u9ecf\u8457\u524d\u5fc5\u9808\u5148\u6e05\u6d17\uff0c\u63a5\u8457\u5728\u77fd\u6676\u7247\u4e0a\u5857\u4e0a\u4e00\u5c64DVS-BCB\u9ad8\u5206\u5b50\uff0c\u518d\u5c07\u96f7\u5c04\u6676\u7247\u9ecf\u4e0a\u53bb(\u7576\u7136\u904e\u7a0b\u6c92\u90a3\u9ebc\u55ae\u7d14)\u3002\u82e5\u76f4\u63a5\u7528\u96fb\u6f3f\u50ac\u5316\u6676\u7247\u8868\u9762\uff0c\u4e5f\u5fc5\u9808\u5148\u5c07\u6676\u7247\u8868\u9762\u7528\u9178\u53ca\u6c2b\u6c1f\u9178\u6e05\u6d17\uff0c\u518d\u5229\u7528\u6c27\u96fb\u6f3f\u6fc0\u6d3b\u8868\u9762\uff0c\u63a5\u8457\u8fc5\u901f\u5c07\u5169\u7247\u9ecf\u5728\u4e00\u8d77\uff0c\u6700\u5f8c\u518d\u653e\u7f6e\u9ad8\u6eab\u6578\u5c0f\u6642\u3002\u5176\u512a\u9ede\u70ba\u5169\u7247\u6676\u7247\u662f\u771f\u7684\u76f4\u63a5\u9ecf\u5728\u4e00\u8d77\uff0c\u4e2d\u9593\u6c92\u6709\u4efb\u4f55\u593e\u5c64\uff0c\u6240\u4ee5\u5149\u8026\u5408\u6548\u7387\u4f73\uff0c\u4f46\u56f0\u96e3\u9ede\u5728\u65bc\u88fd\u7a0b\u689d\u4ef6\u975e\u5e38\u56b4\u82db\uff0c\u56e0\u70ba\u9019\u500b\u65b9\u6cd5\u5b8c\u5168\u9760\u6750\u6599\u8868\u9762\u53d7\u96fb\u6f3f\u6fc0\u6d3b\u5f8c\u66ab\u6642\u7684\u9ecf\u6027\uff0c\u9664\u4e86\u8a66\u7247\u8868\u9762\u7684\u6e05\u6d17\u8981\u975e\u5e38\u4e7e\u6de8\u4ee5\u5916\uff0c\u6b65\u9a5f\u8ddf\u6b65\u9a5f\u4e4b\u9593\u4e5f\u5fc5\u9808\u5f88\u5feb\u901f\u9023\u63a5\u8d77\u4f86\uff0c\u5426\u5247\u8868\u9762\u72c0\u614b\u6539\u8b8a\u5c31\u7121\u6cd5\u63a5\u5408\u6210\u529f\u4e86\u3002<\/p>\n

\u76ee\u524d\u5b78\u8853\u754c\u7814\u7a76\u6676\u5713\u63a5\u5408\u6700\u8ca0\u76db\u540d\u7684\u55ae\u4f4d\u662f\u6bd4\u5229\u6642\u7684IMEC\u4ee5\u53ca\u52a0\u5dde\u5927\u5b78\u8056\u5854\u82ad\u82ad\u62c9\u5206\u6821(University of California, Santa Barbara)\u7684John Bowers\u6559\u6388\uff0cJohn Bowers\u6559\u6388\u66f4\u662f\u5229\u7528\u9019\u500b\u6280\u8853\u6210\u7acb\u4e00\u9593\u65b0\u5275\u516c\u53f8Aurrion\uff0c\u7531\u6b64\u53ef\u898b\u9019\u9805\u6280\u8853\u9817\u5177\u672a\u4f86\u6027\uff0c\u4f46\u6676\u5713\u63a5\u5408\u6280\u8853\u7684\u8026\u5408\u6548\u7387\u9084\u8981\u900f\u904e\u8a31\u591a\u8907\u96dc\u7684\u5149\u5b78\u8a2d\u8a08\u53ca\u5c0d\u4f4d\u6280\u8853\uff0c\u4ecd\u9084\u6709\u5f88\u9577\u7684\u8def\u8981\u8d70\u3002<\/p>\n

\u5716\u7247\u4f86\u6e90\uff1a<\/strong>Lamponi, M., Shahram Keyvaninia, C. Jany, F. Poingt, F. Lelarge, G. De Valicourt, G\u00fcnther Roelkens et al. \"Low-threshold heterogeneously integrated InP\/SOI lasers with a double adiabatic taper coupler.\" Photonics Technology Letters, IEEE 24, no. 1 (2012): 76-78.<\/p>\n

\u53c3\u8003\u8cc7\u6599\uff1a<\/strong><\/p>\n

    \n
  1. Lamponi, M., Shahram Keyvaninia, C. Jany, F. Poingt, F. Lelarge, G. De Valicourt, G\u00fcnther Roelkens et al. \"Low-threshold heterogeneously integrated InP\/SOI lasers with a double adiabatic taper coupler.\"\u00a0Photonics Technology Letters, IEEE<\/em>\u00a024, no. 1 (2012): 76-78.<\/li>\n
  2. Keyvaninia, Shahram, Gunther Roelkens, Dries Van Thourhout, Christophe Jany, Marco Lamponi, Alban Le Liepvre, Francois Lelarge et al. \"Demonstration of a heterogeneously integrated III-V\/SOI single wavelength tunable laser.\"Optics express<\/em>\u00a021, no. 3 (2013): 3784-3792.<\/li>\n
  3. Bondarenko, Olesya, Cheng-Yi Fang, Felipe Vallini, Joseph ST Smalley, and Yeshaiahu Fainman. \"Extremely compact hybrid III-V\/SOI lasers: design and fabrication approaches.\"\u00a0Optics express<\/em>\u00a023, no. 3 (2015): 2696-2712.<\/li>\n
  4. Fang, Alexander W., Hyundai Park, Ying-hao Kuo, Richard Jones, Oded Cohen, Di Liang, Omri Raday, Matthew N. Sysak, Mario J. Paniccia, and John E. Bowers. \"Hybrid silicon evanescent devices.\"\u00a0Materials today<\/em>\u00a010, no. 7 (2007): 28-35.<\/li>\n<\/ol>\n

    --<\/strong><\/span>
    \u4f5c\u8005\uff1a\u65b9\u7a0b\u6bc5 \u79d1\u6559\u4e2d\u5fc3\u7279\u7d04\u5beb\u624b\uff0c\u5f9e\u4e8b\u79d1\u666e\u6587\u7ae0\u5beb\u4f5c\u3002<\/strong><\/span><\/p>\n

     <\/p>\n

    \"\u52a0\u5165\u597d\u53cb\"<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"

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